Optical study of porous silicon buried waveguides fabricated from p-type silicon

Silicon Porosification: State of the Art

“…178,179,499,500 Besides that, the transformation of porous silicon into oxidized PSi also allows achieving light transmission in the visible wavelength range. 478 As was shown, oxidized PSi could also be successfully used for the elaboration of gas sensors, 189 electrochemical sensors, 484 biosensors, 162 and device insulation.…”

Influence of experimental parameters on physical properties of porous silicon and oxidized porous silicon layers

“…It can be used as a base material for passive or active optical devices such as Bragg reflectors [2,3], planar and buried waveguides [4][5][6][7], micro-cavities [8][9][10]. These optical multilayer-structures require that both the thickness and refractive index are well controlled.…”

A simple method to fabricate buried channel optical waveguides based on porous silicon

“…As the surface in contact with the electrolyte was not constant during the anodization process and increased so that the density of current decreased, thus the porosity decreased 8 . This resulted in an increase in the refractive index for every layer as illustrated in Fig.8.…”