Optical system for a multiple-beam scanning electron microscope

Enyama, Momoyo; Sakakibara, Makoto; Tanimoto, Sayaka; Ohta, Hiroya

doi:10.1116/1.4891961

Cited by 9 publications

(4 citation statements)

References 18 publications

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“…A number of options for producing an array of electron beams has been demonstrated (Platzgummer et al ., and references therein). More options to perform imaging with a multibeam electron microscope have also been demonstrated (Mohammadi‐Gheidari et al ., ; Mohammadi‐Gheidari & Kruit, ; Enyama et al ., ).…”

Section: Circumventing the Single‐beam Limitations With A Multibeam Amentioning

confidence: 97%

High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

Eberle

Mikula

Schalek

et al. 2015

Journal of Microscopy

222

168

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Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.Lay DescriptionThe composition of our world and our bodies on the very small scale has always fascinated people, making them search for ways to make this visible to the human eye. Where light microscopes reach their resolution limit at a certain magnification, electron microscopes can go beyond. But their capability of visualizing extremely small features comes at the cost of a very small field of view. Some of the questions researchers seek to answer today deal with the ultrafine structure of brains, bones or computer chips. Capturing these objects with electron microscopes takes a lot of time – maybe even exceeding the time span of a human being – or new tools that do the job much faster. A new type of scanning electron microscope scans with 61 electron beams in parallel, acquiring 61 adjacent images of the sample at the same time a conventional scanning electron microscope captures one of these images. In principle, the multibeam scanning electron microscope’s field of view is 61 times larger and therefore coverage of the sample surface can be accomplished in less time. This enables researchers to think about large-scale projects, for example in the rather new field of connectomics. A very good introduction to imaging a brain at nanometre resolution can be found within course material from Harvard University on http://www.mcb80x.org/# as featured media entitled ‘connectomics’.

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Section: Circumventing the Single‐beam Limitations With A Multibeam Amentioning

confidence: 97%

High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

Eberle

Mikula

Schalek

et al. 2015

Journal of Microscopy

222

168

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“…SEE may occur in space high-power microwave systems, particle accelerators, and space thrusters [1][2][3][4], which may lead to the phenomenon of multipactor discharge in these systems [5][6][7][8][9][10][11][12]. Apart from these typical occurrence occasions, SEE plays a vital role in high-precision measurement instruments such as scanning electron microscope (SEM), x-ray photoelectron spectroscopy (XPS), and Auger electron spectrometer [13][14][15][16]. In addition, SEE is the fundamental operation principle of electron multipliers [17][18][19][20][21], including discrete dynode electron multipliers, channel electron multipliers, and microchannel plates.…”

Section: Introductionmentioning

confidence: 99%

Effect of atmospheric environment on the stability of secondary electron emission from magnesium oxide and alumina surfaces

Lian,

Zhu,

Wang

et al. 2023

J. Phys. D: Appl. Phys.

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MgO and Al2O3 are two typical ceramics with high secondary electron yield (SEY) and are widely applied in electron multiplier devices as dynode coating. However, dynodes in multipliers are inevitably exposed to various environments, degenerating their SEY performance. To specify the influence of the atmospheric environment on SEY for MgO and Al2O3 ceramics, we conducted environmental stability experiments on MgO and Al2O3 nanofilms. By exposing the nanofilms fabricated by atomic layer deposition to air for certain durations, it was found that although the MgO film possessed high SEY, its SEY decreased significantly as the storage duration increased, specifically, its SEY peak value (δ m) decreased from 5.97 to 3.35 after 180 d. Whereas the SEY of the Al2O3 film changed very little with the storage duration extending, its δ m decreased from 4.01 to 3.70 after 180 d, indicating the Al2O3 film had good SEY environmental stability. To reveal the mechanism of SEY degradation, the modification analysis of surface composition was implemented. It was found that the surface of MgO film underwent degradation besides unavoidable contamination, generating Mg(OH)2 and MgCO3. Whereas, there is no chemical reaction occurred on the Al2O3 surface. Combining the advantages of high SEY of MgO and good environmental stability of Al2O3, several Al2O3/MgO double-layer nanofilms were prepared. The δ m value of 20 nm MgO nanofilms covered by 1 nm Al2O3, decreased from 4.90 to 4.56, with a reduction of only 6.94% after 180 d. The results showed that the Al2O3 film achieved effective protection of the MgO film. The SEY environmental stability of the double-layer structure was significantly improved, and the effect of thickness on SEY was theoretically interpreted. This work makes significant sense for understanding the influence of the environment on the SEY for MgO and Al2O3, which has potential applications in electron multipliers.

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“…Several groups are doing these, e.g., Mohammadi-Gheidari and Kruit, 3 D. Zeidler and G. Dellemann, 4 and Enyama et al 5 Some published their experimental results, e.g., Mohammadi-Gheidari et al, 6 and Eberle et al 7 Zeiss also released a commercial multibeam SEM (MBSEM) which has 61 or 91 beams, with secondary electron (SE) detection.…”

Section: Introductionmentioning

confidence: 99%

Transmission electron imaging in the Delft multibeam scanning electron microscope 1

Ren

Kruit

2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Our group is developing a multibeam scanning electron microscope (SEM) with 196 beams in order to increase the throughput of SEM. Three imaging systems using, respectively, transmission electron detection, secondary electron detection, and backscatter electron detection are designed in order to make it as versatile as a single beam SEM. This paper focuses on the realization of the transmission electron imaging system, which is motivated by biologists' interest in the particular contrast this can give. A thin sample is placed on fluorescent material which converts the transmitted electrons to photons. Then, the 196 photon beams are focused with a large magnification onto a camera via a high quality optical microscope integrated inside the vacuum chamber. Intensities of the transmission beams are retrieved from the camera images and constructed to form each beam's image using an off line image processing program. Experimental results prove the working principle of transmission electron imaging and show that details of 10–20 nm in images of biological specimen are visible. Problems encountered in the results are discussed and plans for future improvements are suggested.

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Optical system for a multiple-beam scanning electron microscope

Cited by 9 publications

References 18 publications

High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

Effect of atmospheric environment on the stability of secondary electron emission from magnesium oxide and alumina surfaces

Transmission electron imaging in the Delft multibeam scanning electron microscope 1

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