Optical vortex beam direct-writing photolithography

Li, Xiongfeng; Liang, Yiyong; Zhan, Shichao; Xu, Jianfeng; Bai, Jian; Wang, Kaiwei

doi:10.7567/apex.11.036503

Cited by 9 publications

(5 citation statements)

References 30 publications

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“…As noted initially, technological applications for structured light fields currently emerge, including e.g. photolithography 63 . In the context of such applications, trapped atoms may serve as precise probes with sub-wavelength resolution for mapping out the properties of the light fields, in order to characterize and improve optical instrumentation.…”

Section: Discussion and Outlookmentioning

confidence: 99%

Trapped atoms in spatially-structured vector light fields

Verde,

Schmiegelow,

Poschinger

et al. 2023

Sci Rep

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Spatially-structured laser beams, eventually carrying orbital angular momentum, affect electronic transitions of atoms and their motional states in a complex way. We present a general framework, based on the spherical tensor decomposition of the interaction Hamiltonian, for computing atomic transition matrix elements for light fields of arbitrary spatial mode and polarization structures. We study both the bare electronic matrix elements, corresponding to transitions with no coupling to the atomic center-of-mass motion, as well as the matrix elements describing the coupling to the quantized atomic motion in the resolved side-band regime. We calculate the spatial dependence of electronic and motional matrix elements for tightly focused Hermite–Gaussian, Laguerre–Gaussian and for radially and azimuthally polarized beams. We show that near the diffraction limit, all these beams exhibit longitudinal fields and field gradients, which strongly affect the selection rules and could be used to tailor the light-matter interaction. The presented framework is useful for describing trapped atoms or ions in spatially-structured light fields and therefore for designing new protocols and setups in quantum optics, -sensing and -information processing. We provide open code to reproduce our results or to evaluate interaction matrix elements for different transition types, beam structures and interaction geometries.

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Section: Discussion and Outlookmentioning

confidence: 99%

Trapped atoms in spatially-structured vector light fields

Verde,

Schmiegelow,

Poschinger

et al. 2023

Sci Rep

View full text Add to dashboard Cite

show abstract

“…As noted initially, technological applications for structured light fields currently emerge, including e.g. photolithography Li et al [2018]. In the context of such applications, trapped atoms may serve as precise probes with sub-wavelength resolution for mapping out the properties of the light fields, in order to characterize and improve optical instrumentation.…”

Section: Discussion and Outlookmentioning

confidence: 99%

Die Anfänge des Frauenstudiums an der Johannes Gutenberg-Universität Mainz

George¹

2023

Frauen an Der Johannes Gutenberg-Universität Mainz (1946–2022)

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Spatially-structured laser beams, eventually carrying orbital angular momentum, affect electronic transitions of atoms and their motional states in a complex way. We present a general framework, based on the spherical tensor decomposition of the interaction Hamiltonian, for computing atomic transition matrix elements for light fields of arbitrary spatial mode and polarization structures. We study both the bare electronic matrix elements, corresponding to transitions with no coupling to the atomic center-of-mass motion, as well as the matrix elements describing the coupling to the quantized atomic motion in the resolved side-band regime. We calculate the spatial dependence of electronic and motional matrix elements for tightly focused Hermite-Gaussian, Laguerre-Gaussian and for radially and azimuthally polarized beams. We show that near the diffraction limit, all these beams exhibit longitudinal fields and field gradients, which strongly affect the selection rules and could be used to tailor the light-matter interaction. The presented framework is useful for describing trapped atoms or ions in spatially-structured light fields and therefore for designing new protocols and setups in quantum optics, -sensing and -information processing.

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“…Since we know the initial incident light fields from section 2.1, it is not difficult to obtain this intensity distribution by solving the differential equations listed in section 2.2. However, we have to convert the 2D intensity distribution in the polar coordinates (w, j) to the 1D timevarying intensity distribution on a slice of the direct-writing line [35] before using the differential model. That means the incident light fields should be written as ( )…”

Section: The Dynamic Exposure Dose Integralmentioning

confidence: 99%

Selection of the confining beam for laser direct writing with scanning absorbance modulation

Li¹,

Liang²

2019

J. Opt.

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Absorbance-modulation optical lithography has been proposed to obtain super-resolution grating patterns with far-field optics. However, the patterns are monotonous since the interference fringes are used as the confining beam. We propose laser direct writing with scanning absorbance modulation to produce free super-resolution patterns. Four kinds of optical vortex beams are studied as the confining beam and the performance of scanning absorbance modulation using each of them is simulated. In conclusion, the selection of the best confining beam has to follow three criteria and an example is the 2-level, 1.5-order optical vortex beam.

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Optical vortex beam direct-writing photolithography

Cited by 9 publications

References 30 publications

Trapped atoms in spatially-structured vector light fields

Trapped atoms in spatially-structured vector light fields

Die Anfänge des Frauenstudiums an der Johannes Gutenberg-Universität Mainz

Selection of the confining beam for laser direct writing with scanning absorbance modulation

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