2006
DOI: 10.1364/opex.14.000120
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Optical vortex metrology for nanometric speckle displacement measurement

Abstract: As an alternative to correlation-based techniques widely used in conventional speckle metrology, we propose a new technique that makes use of phase singularities in the complex analytic signal of a speckle pattern as indicators of local speckle displacements. The complex analytic signal is generated by vortex filtering the speckle pattern. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology with nano-scale resolution.

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Cited by 126 publications
(71 citation statements)
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“…Optical singularities present a growing interest for applications, e.g. metrology for precise displacement measurement [2], or orbital angular momentum modulation for optical communications [3].…”
Section: Introductionmentioning
confidence: 99%
“…Optical singularities present a growing interest for applications, e.g. metrology for precise displacement measurement [2], or orbital angular momentum modulation for optical communications [3].…”
Section: Introductionmentioning
confidence: 99%
“…The first system (named SUPHIM-SUperresolution PHase Image Microscope) was proposed and tested by V. Tychynsky [1,2]. Although the solution proposed by Tychynsky was not successful [3], the phase singularities are still believed to constitute a potential solution for new imaging microscopic systems [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18] (not all of which were focused on superresolution [7,8,13,14]). Presently, the most successful superresolution system using optical vortices is the STED microscope [9], where the vortex beam is used as a depletion beam.…”
Section: Introductionmentioning
confidence: 99%
“…Light beams having optical vortices (OVs) or phase singularities [1][2][3][4] have been attracting much interest because of their wide range of applications, such as information encoding, 5 optical manipulation, 6,7 stimulated emission depletion microscopy, 8 optical metrology, 9,10 and so on. The phase structure of an OV has a helical waveform that varies continuously from 0 to 2nπ rad (where n is an integer called the topological charge), and the center of the phase structure is a singular point with zero amplitude and an undefined phase.…”
Section: Introductionmentioning
confidence: 99%