“…This is because the metallic nature of building meta-atoms always holds immobilized properties, thus fixing the function of devices. [26] Therefore, significant attention has been paid to modulators based on tunable metasurfaces consisting of active materials such as semiconductors, [21,[27][28][29][30][31] 2D materials, [32,33,34] phase change materials, [35][36][37][38][39][40] Dirac semimetal, [41] and perovskites. [42][43][44][45][46] Accordingly, depending on various characteristics of the active materials, a series of external stimuli including optical, [27,28,36,38,42,43] electrical, [21,22,29,34,49] thermal, [35,37,47,48] and mechanical [50] methods jointly promote the development of THz modulators in a more intelligent and multidimensional direction.…”