of semiconductor technology, such as consecutive lithographic steps with layers alignment, and the deposition and chemical etching of materials, are used. Besides, for preventing the capillary sticking of 3D microstructures and nanostructures, special treatments of surfaces and the supercritical drying technique are used after liquid-etching and resistdevelopment steps. [15,16] In ref.[17], a method was proposed for fabrication of microhelices and nanohelices from elastically strained thin semiconductor strips detached, with the help of selective etching of a sacrificial layer, from the substrate and then rolled in classically shaped 3D helices. The latter approach, combined with supercritical drying, [16] was successively employed for forming, on a GaAs substrate, a chiral metamaterial in the form of a single-layer array of 14.5 µm diameter 3D microhelices fabricated from a strained hybrid semiconductor-metal (In 0.2 Ga 0.8 As/GaAs/Ti/Au) films. [18,19] It was shown that the maximum polarization-plane rotation angle for terahertz radiation having passed the heliceson-substrate system reached 17° at 2.1 THz frequency. A close value for the polarization-plane rotation angle of terahertz radiation, 14°, was also obtained using a structure that involved 3D metal gammadion-shaped elements located directly on the surface of pyramidal trenches etched in a silicon substrate. [20] Experimental data obtained for both chiral metamaterials proved a high effectiveness of the interaction of electromagnetic radiation with the 3D conducting microresonators, thus encouraging the workers to spent further efforts on the search for simpler and cheaper technological solutions.Today, rapid progress in the development of additive technologies [21,22] opens up wide opportunities in the field of 3D chiral resonator elements, 3D metamaterials, and photonic crystals. [23][24][25] A number of sequential 3D printing methods have enabled the point-by-point formation of free-standing conducting helices for chiral metamaterials active in a broad range of radiation wavelengths, from microwave (MW) to optical frequencies. Those methods can be classed to several groups. First, these are methods including the electrochemical and chemical deposition of metals onto the surface of printed 3D polymer structures: i) filling of helically shaped channels with a metal [9,26] and ii) covering of free-standing 3D helical microcarcasses with a metal. [27] Second, this is the growth of An original design for chiral metasurfaces formation is proposed. The hybrid fabrication approach is based on the 3D printing of polymer substrates with a shape-generating "helical" relief, molding, and subsequent shadow metal deposition. The formed double-layer grating of multiturn metal helices rotates the polarization plane of sub-terahertz and microwave radiation through an angle in excess of 40°. Both experimentally and in numerical simulations, it is demonstrated that re-reflection phenomena occur in the "metal helixpolymer substrate" hybrid structure. Those phenomena per...