Abstract. The problem of non-contact geometrical measurements by the stereoscopic spectral AOTF-based imagers is considered. Major factors contributing to the measurement error are analyzed for the first time. Expressions are derived for area measurement inaccuracy on arbitrary shape surfaces, caused by measurement errors of individual points' 3D coordinates with and without a priori information about surface shape. Verification of the obtained expressions with the real experimental data showed that area measurement error for a complex figure, given by the set of points, is caused mainly by ignoring the fact that these points belong to the surface. It is shown that the use of a priori information about investigated surface shape, which is often available from the design documentation, in many cases would radically improve the accuracy of surface defects area measurement. The presented results can be effectively used for the development of new 3D spectral imagers and modernization of existing ones.