Optimal design of a flexure hinge based XYφ wafer stage

Ryu, Jae W.; Gweon, Dae−Gab; Moon, Kiwon

doi:10.1016/s0141-6359(97)00064-0

Cited by 202 publications

(127 citation statements)

References 5 publications

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“…Considering the ratios between rotations (in mrad) around the z-axis and the size (in mm) in the XY-plane (WRθz/Sx·y), again the largest ratio has been reached in Chen and Culpepper (2006). Also in and Ryu et al (1997) a relative large ratio is found, compared to the other stages. The results showed that there is no clear relation between flexure type and translation/size or rotation/size ratio in XY-plane.…”

Section: Discussionmentioning

confidence: 81%

“…Due to this arrangement many stages were highly symmetric. This is to decrease the effect of the temperature gradient on accuracy of the design (Ryu et al, 1997).…”

Section: Discussionmentioning

confidence: 99%

“…Planar monolithic 3 DoF stages were found in Lu et al (2004), Ryu et al (1997), Tian et al (2010), Wang and Zhang (2008), and Yi et al (2003). The circular notch flexure groups are arranged 120…”

Section: Planar Compliant Stagesmentioning

confidence: 92%

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Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

2011

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Abstract. For many applications in precision engineering, a six degrees of freedom (DoF) compliant stage (CS) with zero stiffness is desirable, to deal with problems like backlash, friction, lubrication, and at the same time, reduce the actuation force. To this end, the compliant stage (also known as compliant mechanism) can be statically balanced with a stiffness compensation mechanism, to compensate the energy stored in the compliant parts, resulting in a statically balanced compliant stage (SBCS). Statically balanced compliant stages can be a breakthrough in precision engineering. This paper presents an inventory of platforms suitable for the design of a 6 DoF compliant stage for precision engineering. A literature review on 3-6 DoF compliant stages, static balancing strategies and statically balanced compliant mechanisms (SBCMs) has been performed. A classification from the inventory has been made and followed up by discussion. An obviously superior architecture for a 6 DoF compliant stage was not found. All the 6 DoF stages are either non-statically balanced compliant structures or statically balanced non-compliant structures. The statically balanced non-compliant structures can be transformed into compliant structures using lumped compliance, while all SBCMs had distributed compliance. A 6 DoF SBCS is a great scope for improvements in precision engineering stages.

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Section: Discussionmentioning

confidence: 81%

“…Due to this arrangement many stages were highly symmetric. This is to decrease the effect of the temperature gradient on accuracy of the design (Ryu et al, 1997).…”

Section: Discussionmentioning

confidence: 99%

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Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

2011

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“…However, the displacement range is limited to tens of µm, therefore special attention must be paid during the design to avoid mechanical play. This motivates the use of flexure hinges combined in such ways that they realize the desired degrees of freedom (DOF) [7] or magnification [8]. During the design, attention must be paid to the rigidities that should be as small as possible along the desired DOF and very large for the other DOF, and the parasitic motions that may result from the imperfections of the hinges or from the kinematic are negligible [9].…”

Section: A Mechanical Designmentioning

confidence: 99%

Control of a multi-degree of freedom worktool for vibrations assisted forging

Giraud-Audine

Nguyen

Amberg

et al. 2014

2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. Abstract-This paper addresses the control of a tool developed to superimpose vibrations along several directions on a piece during forging. Piezoelectric actuators are used to provide the required forces and speeds. Due to the minute displacements of the actuators, flexible hinges are used in a special arrangement in order realize the specified movements and to ensure controllability. The experimental results confirm the approach.

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“…The 3RRR parallel structure has attracted the attention of many researchers [4][5][6][7] . This structure has its advantages, however, the forward/direct kinematics of the parallel mechanism is very complex and non-linear.…”

Section: Introductionmentioning

confidence: 99%

Loop closure theory in deriving linear and simple kinematic model for a 3-DOF parallel micromanipulator

Yong

Handley

2004

SPIE Proceedings

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Various types of micro-motion devices have been developed in the past decade for applications including the manipulation of cells in micro-surgery and the assembly of micro-chips in micro-assembly industries. Most of the micro-motion devices are designed using the compliant mechanism concept, where the devices gain their motions through deflections. In addition, closed-loop parallel structures are normally adopted due to better stiffness and accuracy compared to the serial structures. However, the forward kinematics of parallel structures are complex and non-linear; to solve these equations, a numerical iteration technique has to be employed. This iteration process will increase computational time, which is highly undesirable. This paper presents a method of deriving a simple, linear and yet effective kinematic model based on the loop closure theory and the concept of the pseudo-rigid-body model. This method is illustrated with a 3 DOF (degree-of-freedom) micro-motion device. The results of this linear method are compared with a full kinematic model for the same micro-motion system. It is proved that the derived kinematic model in this paper is accurate and the methodology proposed is effective. The static model of the micro-motion device will also be presented. The uncoupling property of the micro-motion systems, based on the static model, will be briefly discussed.

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Optimal design of a flexure hinge based XYφ wafer stage

Cited by 202 publications

References 5 publications

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

Control of a multi-degree of freedom worktool for vibrations assisted forging

Loop closure theory in deriving linear and simple kinematic model for a 3-DOF parallel micromanipulator

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