Optimal design of a piezo-actuated 2-DOF millimeter-range monolithic flexure mechanism with a pseudo-static model

Ling, Mingxiang; Cao, Junyi; Jiang, Zhou; Zeng, Minghua; Li, Qisheng

doi:10.1016/j.ymssp.2018.05.064

Cited by 81 publications

(30 citation statements)

References 32 publications

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“…Moreover, kinematic approximation and mass lumping are avoided. However, the resulting transcendental or polynomial eigen-problem for the solution of natural frequencies and the difficulty to formulate the dynamic stiffness matrix of some irregular members in compliant mechanisms with lumped compliance are main disadvantages of this method [131,132].…”

Section: Othermentioning

confidence: 99%

“…To sum up, the previous dynamic modeling of compliant mechanisms was mainly based on Lagrange's method [113][114][115][116][117][118][119][120][121][122][123][124][125][126][127][128][129][130]. In recent years, some newly dynamic modeling approaches, such as the pseudorigid-body model with mass factors [108] and the dynamic stiffness modeling method based on d'Alembert's principle [18,131,132], were developed for the dynamic analysis of compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

“…In the second category, the equivalent input/output stiffness of compliant mechanisms is first modeled by using a variety of kinetostatic methods, the dynamic model can be then formulated by calculating elastic and kinetic energies based on Lagrange's equation with motion degrees-offreedom (DOFs) as the variables, all these solutions can be classified as a lumped-parameter dynamic model [119][120][121][122][123]. The third category is termed the distributed-parameter model with finite number of DOFs [124][125][126][127][128][129][130][131][132], in which compliant mechanisms are usually discretized into several submembers and the dynamic model is established by calculating total elastic and kinetic energies. For example, a method similar to the rigid-multibody dynamics [19,126] was used to design flexure manipulators by several groups [127][128][129][130]; moreover, various finite element dynamic models have been developed in the last decades [92,124,125].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

Self Cite

165

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Flexure-based compliant mechanisms are becoming increasingly promising in precision engineering, robotics, and other applications due to the excellent advantages of no friction, no backlash, no wear, and minimal requirement of assembly. Because compliant mechanisms have inherent coupling of kinematic-mechanical behaviors with large deflections and/or complex serial-parallel configurations, the kinetostatic and dynamic analyses are challenging in comparison to their rigid-body counterparts. To address these challenges, a variety of techniques have been reported in a growing stream of publications. This paper surveys and compares the conceptual ideas, key advances, and applicable scopes, and open problems of the state-of-the-art kinetostatic and dynamic modeling methods for compliant mechanisms in terms of small and large deflections. Future challenges are discussed and new opportunities for extended study are highlighted as well. The presented review provides a guide on how to select suitable modeling approaches for those engaged in the field of compliant mechanisms.

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Section: Othermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

Self Cite

165

View full text Add to dashboard Cite

show abstract

“…Nano accuracy positioning technology successfully emerges from fundamental research to advanced engineering areas, such as semiconductor equipment, biology engineering and optical devices [1]- [3]. In particular, piezoelectric actuated nano-positioning systems are explored in these applications thanks to the features of high resolution and high bandwidth, which, consequently, has raised increasing concerns over mechanism design, modeling analysis and control of such systems [4]- [8].…”

Section: Introductionmentioning

confidence: 99%

Sampled-Data Adaptive ESO Based Composite Control for Nano-Positioning Systems

Tian

Yan

2020

IEEE Access

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This work studies a novel sampled-data adaptive extended state observer (ESO) based composite control approach for the digital nano-positioning systems with sampling restrictions. In the proposed control architecture, a sampled-data ESO with an output predictor is designed to estimate states and disturbances within a continuous period of time, where the observer gains are adaptively updated. To deal with the inter-sample disturbances, a multirate disturbance compensator is then worked out by upsampling, with which a discrete composite feedback controller with linear and nonlinear parts is employed aiming at improving the transient performance of positioning. Moreover, the estimation convergence and the stability are analyzed by means of Lyapunov methods. The proposed control method is then applied to the simulations and experiments in a piezoelectric nano-positioning system so as to validate its effectiveness.

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“…It should be pointed out that the direct output displacement of a piezoelectric actuator is about one thousandth of its own length, which usually can not meet the requirements of large working range in most cases. Amplifying mechanism is typically employed to amplify and transmit displacement, such as lever mechanism (Xing, 2015;Tang and Li, 2015;Tang et al, 2018), Scott-Russell mechanism (Tian et al, 2009), rhombic mechanism (Ling et al, 2018), bridge-type mechanism (Li and Xu, 2011;Chen et al, 2018;Clark et al, 2018). Among various amplifying mecha-nisms, bridge-type mechanism was widely investigated due to its characteristics of high amplification ratio, compact structure and easy processing.…”

Section: Introductionmentioning

confidence: 99%

Displacement amplification ratio modeling of bridge-type nano-positioners with input displacement loss

Jin-yin

Yan

2019

Mech. Sci.

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Abstract. This paper presents an improved modeling method for bridge-type mechanism by taking the input displacement loss into consideration, and establishes an amplification ratio model of bridge-type mechanism according to compliance matrix method and elastic beam theory. Moreover, the amplification ratio of the designed bridge-type nano-positioner is obtained by taking the guiding mechanism as the external load of bridge-type mechanism. Comparing with existing methods, the proposed model is more accurate, which is further verified by finite element analysis(FEA) and experimental test. The consistency of the results obtained from theoretical model, FEA and experimental testing indicates that the proposed model can accurately predict the amplification characteristics of nano-positioners, which helps the analysis and design of bridge-type nano-positioners in practical applications.

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Optimal design of a piezo-actuated 2-DOF millimeter-range monolithic flexure mechanism with a pseudo-static model

Cited by 81 publications

References 32 publications

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Sampled-Data Adaptive ESO Based Composite Control for Nano-Positioning Systems

Displacement amplification ratio modeling of bridge-type nano-positioners with input displacement loss

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