2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and 2023
DOI: 10.1109/eurosime56861.2023.10100827
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Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements

Alexey Shaporin
1
,
Chris Stöckel
2
,
Marcel Melzer
3
et al.
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