Optimal Design of Support for a Planoconvex Quartz Resonator

Abstract

In this paper, we report the optimal design of a support for a fundamental planoconvex ATcut quartz resonator fabricated using our newly developed etching process. We established a three-dimensional finite element model and carried out eigen-frequency analysis. To describe quantitatively the energy trapping performance of the resonator, we introduced a parameter called the energy trapping rate, which is defined by the ratio of the vibration energy inside to that outside of the electrode region. Two types of our new designs were evaluated in this work, and the optimal one for providing a large energy-trapping rate was determined. On the basis of the calculated results, we fabricated resonators and measured their Q-factors. The calculated and experimental results show an improvement in the efficiency of resonator performance. High Q-factors were also obtained.

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“…We therefore calculated the X-displacement line distribution in the TS mode for different T values (Figs. [6][7][8][9][10].…”

“…The thickness of the Pt film T was optimized in this work. In our previous work, (5,6) we discussed the influence of the dimensions of the two-layer electrode on the performance of quartz resonators. This paper reports the first optimization of the design for a quartz resonator with a three-layer electrode.…”