Optimal Preparation of Aln Thin Films on Sapphire Substrate and its Application in Saw Resonators

Zu, Hongliang; Liu, Minghao; Li, Zhiwei; Li, Tiejun; San, Haisheng

doi:10.2139/ssrn.5049771

2024

DOI: 10.2139/ssrn.5049771

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Optimal Preparation of Aln Thin Films on Sapphire Substrate and its Application in Saw Resonators

Hongliang Zu,

Minghao Liu,

Zhiwei Li

et al.

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Optimal Preparation of Aln Thin Films on Sapphire Substrate and its Application in Saw Resonators

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