“…Recently, ANN models have been widely used to simulate electrical or mechanical characteristics of different MEMS devices. They have been applied mostly to the models of pull-in voltage [20,21,22] and S parameter [23,24,25,26,27,28] of RF-MEMS (radio frequency MEMS) switches, to resonant frequency [29] and spurious modes [30] of RF-MEMS resonator, and to S parameter [31,32,33] of RF-MEMS phase shifter. Uncertainty analysis is the key technique and research focus in the MEMS optimization.…”