Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Xia, Dunzhu; Zhang, Bing; Wu, Hao; Wu, Tao

doi:10.3390/s20247264

Cited by 10 publications

(3 citation statements)

References 19 publications

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“…Moreover, based on the MOEMS techniques, in 2020, D. Xia et al [114][115][116] reported an electrostatically driven MEMS gyroscope with the nested ring structure and detected by the whispering gallery mode (WGM) mode, as shown in Fig. 8(d).…”

Section: Nested Ring Micro-gyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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Section: Nested Ring Micro-gyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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“…While MEMS sensors effectively enable linear vibration monitoring, conventional MEMS gyroscopes have seen limited application in angular vibration measurement due to typical resolutions in the order of microradians [13][14][15][16]. However, recent advances integrating micro-opto-electromechanical systems (MOEMS) have prompted new gyroscopic designs capable of pushing these boundaries.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Optomechanical Micro-Gyroscope for Angular-Vibration Detection

Hassan,

Huang,

Yan

et al. 2024

Photonics

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Micro-gyroscopes based on the Coriolis principle are widely employed in inertial navigation, motion control, and vibration analysis applications. Conventional micro-gyroscopes often exhibit limitations, including elevated noise levels and suboptimal performance metrics. Conversely, the advent of cavity optomechanical system technology heralds an innovative approach to micro-gyroscope development. This method enhances the device’s capabilities, offering elevated sensitivity, augmented precision, and superior resolution. This paper presents our main contributions which include a novel dual-frame optomechanical gyroscope, a unique photonic crystal cavity design, and advanced numerical simulation and optimization methods. The proposed design utilizes an optical cavity formed between dual oscillating frames, whereby input rotation induces a measurable phase shift via optomechanical coupling. Actuation of the frames is achieved electrostatically via an interdigitated comb-drive design. Through theoretical modeling based on cavity optomechanics and finite element simulation, the operating principle and performance parameters are evaluated in detail. The results indicate an expected angular rate sensitivity of 22.8 mV/°/s and an angle random walk of 7.1 × 10−5 °/h1/2, representing superior precision to existing micro-electromechanical systems gyroscopes of comparable scale. Detailed analysis of the optomechanical transduction mechanism suggests this dual-frame approach could enable angular vibration detection with resolution exceeding state-of-the-art solutions.

show abstract

“…While MEMS sensors effectively enable linear vibration monitoring, conventional MEMS gyroscopes have seen limited application in angular vibration measurement due to typical resolutions on the order of microradians [13][14][15][16]. However, recent advances integrating micro-optoelectromechanical systems (MOEMS) have prompted new gyroscopic designs capable of pushing these boundaries.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Optomechanical Micro Gyroscope for Angular-Vibration Detection

N. A. Hassan,

Huang,

Yan

et al. 2023

Preprint

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Micro-gyroscopes based on the Coriolis principle are widely employed in inertial navigation, motion control, and vibration analysis applications. This paper presents our main contributions which include a novel dual-frame optomechanical gyroscope, a unique photonic crystal cavity design, and advanced numerical simulation and optimization methods. The proposed design utilizes an optical cavity formed between dual oscillating frames, whereby input rotation induces a measurable phase shift via optomechanical coupling. Actuation of the frames is achieved electrostatically via an interdigitated comb-drive design. Through theoretical modeling based on cavity optomechanics and finite element simulation, the operating principle and performance parameters are evaluated in detail. Results indicate an expected angular rate sensitivity of 22.8 mV/°/s and angle random walk of 7.1×10-5 °/h1/2, representing superior precision than to existing micro-electromechanical systems gyroscopes of comparable scale. Detailed analysis of the optomechanical transduction mechanism suggests this dual-frame approach could enable angular vibration detection with resolution exceeding state-of-the-art solutions.

show abstract

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Cited by 10 publications

References 19 publications

MEMS and MOEMS Gyroscopes: A Review

MEMS and MOEMS Gyroscopes: A Review

Design and Analysis of Optomechanical Micro-Gyroscope for Angular-Vibration Detection

Design and Analysis of Optomechanical Micro Gyroscope for Angular-Vibration Detection

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