Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

Yang, Xiaoguang; Song, Ruiqi; He, Liang; Wu, Leixin; He, Xin; Liu, Xiaoyu; Tang, Hui; Lu, Xiaolong; Ma, Zeyu; Tian, Peng

doi:10.1039/d2ra05148f

Cited by 7 publications

References 156 publications

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Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large‐Scale Fabrication, and Performance Optimization

Ma,

Wang,

Xiong

et al. 2024

Small

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With the rapid development of micro/nano machining, there is an elevated demand for high‐performance microdevices with high reliability and low cost. Due to their outstanding electrochemical, optical, electrical, and mechanical performance, carbon materials are extensively utilized in constructing microdevices for energy storage, sensing, and optoelectronics. Carbon micro/nano machining is fundamental in carbon‐based intelligent microelectronics, multifunctional integrated microsystems, high‐reliability portable/wearable consumer electronics, and portable medical diagnostic systems. Despite numerous reviews on carbon materials, a comprehensive overview is lacking that systematically encapsulates the development of high‐performance microdevices based on carbon micro/nano structures, from structural design to manufacturing strategies and specific applications. This review focuses on the latest progress in carbon micro/nano machining toward miniaturized device, including structural engineering, large‐scale fabrication, and performance optimization. Especially, the review targets an in‐depth evaluation of carbon‐based micro energy storage devices, microsensors, microactuators, miniaturized photoresponsive and electromagnetic interference shielding devices. Moreover, it highlights the challenges and opportunities in the large‐scale manufacturing of carbon‐based microdevices, aiming to spark further exciting research directions and application prospectives.

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Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large‐Scale Fabrication, and Performance Optimization

Ma,

Wang,

Xiong

et al. 2024

Small

View full text Add to dashboard Cite

show abstract

Current and Future Challenges of Hybrid Electrochemical-Mechanical Machining Process for Micro- and Nano-Manufacturing

Jamaludin,

Mhd Razali,

Nor Hamran

et al. 2024

Springer Proceedings in Materials

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Influence of boundary conditions on non-equilibrium heat transport under ultrafast laser action based on the lattice Boltzmann method

Mao,

Liu,

Liu

et al. 2024

Case Studies in Thermal Engineering

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Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

Abstract: The optimization mechanism of ultrafast laser machining is introduced. The specific applications of laser processed 3D micro/nano structures in optical, electrochemical and biomedical fields are elaborated, and perspectives are presented.

Cited by 7 publications

References 156 publications

Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large‐Scale Fabrication, and Performance Optimization

Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large‐Scale Fabrication, and Performance Optimization

Current and Future Challenges of Hybrid Electrochemical-Mechanical Machining Process for Micro- and Nano-Manufacturing

Influence of boundary conditions on non-equilibrium heat transport under ultrafast laser action based on the lattice Boltzmann method

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