Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

Waid, Simon; Wanzenboeck, Heinz D.; Mühlberger, M.; Bertagnolli, E.

doi:10.1016/j.mee.2012.02.028

Cited by 11 publications

(14 citation statements)

References 22 publications

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“…It uses the silicon dioxide based on the electron beam with polystyrene. For the complex 3D profile, FIB directly carves out the mask for NIL [ 149 , 150 , 151 ]…”

Section: Printing Methodsmentioning

confidence: 99%

“…It uses the silicon dioxide based on the electron beam with polystyrene. For the complex 3D profile, FIB directly carves out the mask for NIL [149][150][151] There have been several attempts to use NIL to create metamaterials over a large-area quickly [152,153]. Wu et al firstly developed a metasurface that worked at near-infrared wavelengths with L shaped components made using NIL.…”

Section: Curing Sourcementioning

confidence: 99%

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Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.

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“…It uses the silicon dioxide based on the electron beam with polystyrene. For the complex 3D profile, FIB directly carves out the mask for NIL [ 149 , 150 , 151 ]…”

Section: Printing Methodsmentioning

confidence: 99%

Section: Curing Sourcementioning

confidence: 99%

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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“…One is the inkjet printing with the typical printers such as the NP 2.1 (GeSim, Germany) [50] and the Z402 (Zcorp, USA) [28]. The other is the nanoimprint lithography with the typical printers such as the EVG620 nanoimprinter [51] and the 520 hot embosser (EV Group, Austria) [52].…”

Section: Dpmentioning

confidence: 99%

Application and Performance of 3D Printing in Nanobiomaterials

Liu

et al. 2013

Journal of Nanomaterials

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3D printing (3DP) is becoming a research and development focus in nanobiomaterials as it can quickly and accurately fabricate any desired 3D tissuemodel only if itssize is appropriate. The different material powders (with different dimensional scales) and the printing strategies are the most direct factors influencing 3DP quality. With the development of nanotechnologies, 3DP is adopted more frequently for its rapidness in fabrication and precision in geometry. The fabrication in micro/nanoscale may change the performance of biomaterials and devices because it can retain more anisotropy of biomaterials compared with the traditionally rapid prototyping techniques. Thus, the biosafety issue is especially concerned by many researchers and is investigated in performance and safety of biomaterials and devices. This paper investigates the performance of 3DP in fabrication of nanobiomaterials and devices so as to partially explain how 3DP influences the performance and safety of nanobiomaterials.

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“…Often the masters are made from silicon wafers using well-established silicon technology, like electron beam lithography or interference lithography combined with reactive ion etching [ 10 ], but also biological samples can be used to directly replicate bionic structures [ 4 , 25 ]. The fabrication of three-dimensional master stamps has also been achieved by focused ion beam related methods [ 26 , 27 ] or by grey scale lithography [ 28 ].…”

Section: Introductionmentioning

confidence: 99%

Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

Taus

Prinz²,

Wanzenboeck

et al. 2021

Nanomaterials

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Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We have demonstrated different approaches allowing for the generation of sophisticated undercut T-shaped masters for NIL replication. With a layer-stack of phase transition material (PTM) on poly-Si, we have demonstrated the successful fabrication of a single layer undercut T-shaped structure. With a multilayer-stack of silicon oxide on silicon, we have shown the successful fabrication of a multilayer undercut T-shaped structures. For patterning optical lithography, electron beam lithography and nanoimprint lithography have been compared and have yielded structures from 10 µm down to 300 nm. The multilayer undercut T-shaped structures closely resemble the geometry of the surface of a Morpho butterfly, and may be used in future to replicate structural colors on artificial surfaces.

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Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

Cited by 11 publications

References 22 publications

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Application and Performance of 3D Printing in Nanobiomaterials

Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

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