2000
DOI: 10.1088/0960-1317/10/3/323
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Optimization of a circular piezoelectric bimorph for a micropump driver

Abstract: Piezoelectric bimorph actuation has been successfully used in numerous types of microdevices, most notably micropumps. However, even for the simple case of circular geometry, analytical treatments are severely limited. This study utilized the finite-element method to optimize the deflection of a circular bimorph consisting of a single piezoelectric actuator, bonding material and elastic plate of finite dimensions. Optimum actuator dimensions were determined for given plate dimensions, actuator-to-plate stiffne… Show more

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Cited by 116 publications
(64 citation statements)
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“…A linearized dynamic system model was established to help improve the original design and dramatic improvements were obtained [34]. They also utilized the finite element method to find the optimal geometric and material parameters for the circular piezoelectric micropump actuator [35].…”
Section: O Mhmentioning
confidence: 99%
See 1 more Smart Citation
“…A linearized dynamic system model was established to help improve the original design and dramatic improvements were obtained [34]. They also utilized the finite element method to find the optimal geometric and material parameters for the circular piezoelectric micropump actuator [35].…”
Section: O Mhmentioning
confidence: 99%
“…The experimental data can be found available in [35]. The same dimensions and material properties listed in Table 4 are used for all the calculations here.…”
Section: Verification By Numerical Simulation and Experimental Measurmentioning
confidence: 99%
“…Such HSJA layouts are similar to those of valve-less pumps. They consist of a fluidic diode, an exit nozzle, and a displacement chamber with a moving piston or diaphragm [15][16][17][18][19][20]. Unlike the valveless pump, the jet flow from the nozzle of the HSJA issues into the ambient space where the HSJ is generated.…”
Section: Introductionmentioning
confidence: 99%
“…The procedure for designing ultrasonic probe element for piezoceramic transducer for the measurement of electrical impedance and loss has been studied in detail by Fattah [21]. The Finite-element method to optimize the deflection of a single piezoelectric circular bimorph actuator was studied by Morris [22].…”
Section: Introductionmentioning
confidence: 99%