2020
DOI: 10.1109/access.2020.2992346
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Optimization of a Fuze MEMS Setback Arming Device Based on the EDM Process

Abstract: This paper introduces the working principle of a MEMS safety and arming (S&A) device and measures and tests a setback arming device. To solve the problem of large fabrication errors in the UV-LIGA process, a MEMS S&A fuze device fabricated by low-speed wire electrical discharge machining (EDM) is proposed. Microsprings are susceptible to flexural deformation and secondary deformation in the EDM process, which is solved by setting the auxiliary support beam, using multiple cuts and destress annealing. The linew… Show more

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Cited by 4 publications
(2 citation statements)
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“…To solve the problems in the test, 100 principle prototypes were processed by the EDM process proposed in reference [ 26 ] instead of the UV-LIGA process, using 50 of each for process comparison, and the results are shown in Table 6 . It can be seen from the table that the EDM process has the advantages of low cost, high precision, and high speed.…”
Section: Test Verification Of the Arming Devicementioning
confidence: 99%
“…To solve the problems in the test, 100 principle prototypes were processed by the EDM process proposed in reference [ 26 ] instead of the UV-LIGA process, using 50 of each for process comparison, and the results are shown in Table 6 . It can be seen from the table that the EDM process has the advantages of low cost, high precision, and high speed.…”
Section: Test Verification Of the Arming Devicementioning
confidence: 99%
“…Kawa et al fabricated a micro spring with characteristic dimensions of 200-400 µm using the threedimensional print method [7]. To reduce fabrication errors in the UV-LIGA process, Qin et al fabricated a plane micro spring using low-speed wire electrical discharge machining [8,9]. Chen et al fabricated T2 copper planar micro springs using precision etching [10].…”
Section: Introductionmentioning
confidence: 99%