2010
DOI: 10.1016/j.solmat.2009.08.012
|View full text |Cite
|
Sign up to set email alerts
|

Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
26
0

Year Published

2012
2012
2021
2021

Publication Types

Select...
6
2
1

Relationship

0
9

Authors

Journals

citations
Cited by 109 publications
(28 citation statements)
references
References 55 publications
2
26
0
Order By: Relevance
“…The AZO2 film presents the morphology similarly to AZO3 but with smaller aggregates, the film having lower RMS value (5.2 nm) compared with AZO1 (RMS = 12.4 nm) and AZO3 (RMS = 8.5 nm). Ωcm) for AZO deposited on PET by RF magnetron sputtering at 100°C [72].…”
Section: Nanoscaled Films and Layersmentioning
confidence: 99%
“…The AZO2 film presents the morphology similarly to AZO3 but with smaller aggregates, the film having lower RMS value (5.2 nm) compared with AZO1 (RMS = 12.4 nm) and AZO3 (RMS = 8.5 nm). Ωcm) for AZO deposited on PET by RF magnetron sputtering at 100°C [72].…”
Section: Nanoscaled Films and Layersmentioning
confidence: 99%
“…The characteristics of the thin layer formed on the substrate are depending on the deposition parameters such as power, gas flow rates, deposition time, substrate temperature and pressure. Among applications that benefited from thin film construction is electronic devices such as semiconductor, transistor, solar cell, led and sensor [2]. Figure 2 shows the illustration of the magnetron sputtering process.…”
Section: Rf Magnetron Sputtering Processmentioning
confidence: 99%
“…Thin film is a layer of material such as titanium, zinc, copper and chromium which has a scale from a nanometer to several micrometers in thickness. Thin film is used in the production of electronic devices such as semiconductor, transistor, solar cell, led and sensor [2]. A more detailed explanation on RF magnetron sputtering is discussed in the third section of this paper.…”
Section: Introductionmentioning
confidence: 99%
“…Transparent conducting oxides (TCOs) are degenerately doped wide band gap metal oxide semiconductors, and are widely used for a range of applications including computer screen electrodes, touch-screen panels, mobile phone screens, LED contacts, and as top contact layers in thin film photovoltaic cells [1], [2], [3]. They are easy to synthesise and deposit, with a wide range of different deposition techniques being regularly employed [3].…”
Section: Introductionmentioning
confidence: 99%