Optimization of Etching Processes for Fabrication of Smooth Silicon Carbide Membranes for Applications in Quantum Technology

Mokhtarzadeh, Mahsa; Carulla, Maria; Kozak, Roksolana; Dávid, Christian

doi:10.2139/ssrn.4007858

Cited by 1 publication

(1 citation statement)

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“…Such materials should be resistant to thermal effects, have high density and low porosity, and other features for thermally and mechanically loaded material [1,2]. The most promising today are ceramic composite materials obtained using modern technologies and the achievements of science and technology [3,4]. Composite materials are heterophase systems of two or more components, with the preservation of the individual properties of each individual component [5].…”

Section: Introductionmentioning

confidence: 99%

Study of the structure and properties of SiC ceramics

Zhilkashinova

Аbilev

et al. 2022

phst

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This paper presents the results of the entropy calculation of the equilibrium constants of chemical reactions at liquid-phase sintering of SiC ceramics with eutectic additives. The composition of the charge for sintering ceramics with nanoadditives forming the liquid phase was determined: MnO nano 1.5 wt. % + Al 2 O 3nano 2 wt.% + SiC µm 94 wt. % + SiO 2µm 2.5 wt. %. Possible chemical reactions of liquid-phase sintering of ceramics at a temperature of 1800 °C in a weakly reducing CO medium were established. The values of the change in the Gibbs energy for all possible chemical reactions at a sintering temperature of 1800 °C were calculated by the method of entropy calculation of the equilibrium constants. The elements of the liquid phase and reinforcing additives were determined.The elements of the liquid phase and reinforcing additives were determined. The structure and properties of finished sintered ceramic samples were studied. Microstructural analysis of ceramics indicated its grain structure with an average grain size of ~10 µm. The main phase components of the ceramics based on silicon oxide were determined. It was found that the sample consists of three main phases: modification of the ring radical of silicate Si 3 O 6 , silicon dioxide SiO 2 and anorthoclase (SiAl)O 4 .

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Section: Introductionmentioning

confidence: 99%