2016
DOI: 10.1088/0256-307x/33/6/066802
|View full text |Cite
|
Sign up to set email alerts
|

Optimization of Gas Sensing Performance of Nanocrystalline SnO 2 Thin Films Synthesized by Magnetron Sputtering

Abstract: Tin oxide (SnO2) is one of the most promising transparent conducting oxide materials, which is widely used in thin film gas sensors. We investigate the dependence of the deposition time on structural, morphological and hydrogen gas sensing properties of SnO2 thin films synthesized by dc magnetron sputtering. The deposited samples are characterized by XRD, SEM, AFM, surface area measurements and surface profiler. Also the H2 gas sensing properties of SnO2 deposited samples are performed against a wide range of … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

0
4
0

Year Published

2017
2017
2023
2023

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 10 publications
(4 citation statements)
references
References 22 publications
0
4
0
Order By: Relevance
“…Chemical resistance gas sensor based on metal oxide semiconductors (MOSs) [1,2] has been widely studied in the detection of toxic and explosive gases because of its simple operation, low cost and high sensitivity. So far, a large number of MOSs have been studied, such as SnO 2 , [3][4][5][6] ZnO, [7][8][9][10] In 2 O 3 , [11] and CuO. [12] Tin oxide (SnO 2 ) based on the change of resistance to detect VOCs has attracted special attention due to its high sensitivity and good stability.…”
Section: Introductionmentioning
confidence: 99%
“…Chemical resistance gas sensor based on metal oxide semiconductors (MOSs) [1,2] has been widely studied in the detection of toxic and explosive gases because of its simple operation, low cost and high sensitivity. So far, a large number of MOSs have been studied, such as SnO 2 , [3][4][5][6] ZnO, [7][8][9][10] In 2 O 3 , [11] and CuO. [12] Tin oxide (SnO 2 ) based on the change of resistance to detect VOCs has attracted special attention due to its high sensitivity and good stability.…”
Section: Introductionmentioning
confidence: 99%
“…Owing to the rapid development of film technology, a large amount of oxide heterointerfaces among transition metal oxides (TMOs) have been fabricated intensively, exhibiting a lot of intriguing physical functionalities because of their unique electronic structure and properties. [1][2][3][4][5][6][7][8][9][10] One typical breakthrough was that the interface between two ABO 3 type perovskite insulators, e.g., LaAlO 3 and SrTiO 3 (LAO/STO), hosts a high-mobility two-dimensional electron gas (2DEG). [11] The conductive interface possesses quantities of fascinating properties such as ferromagnetism, [12][13][14] superconductivity, [15,16] and strong Rashba spin-orbit coupling (Rashba-SOC), [17] which results from the interfacial breaking of inversion symmetry.…”
Section: Introductionmentioning
confidence: 99%
“…Until now, Sb nanofilms have been mainly obtained by micromechanical exfoliation, [16] liquid phase exfoliation, [17] and van der Waals epitaxy. [18][19][20][21][22] In comparison, there are more advantages for the molecular beam epitaxy [23][24][25][26] method in fabricating high-purity ultrathin Sb nanofilms of specific thickness. Recently, the epitaxial growth of Sb nanofilms on the lattice matching substrates, such as Bi 2 Te 3 , Sb 2 Te 3 , [27] PdTe 2 , [9] Ge (111), [28] and Ag (111), [29] has been reported.…”
Section: Introductionmentioning
confidence: 99%