Optimization of laser-firing processes for silicon-heterojunction solar-cell back contacts

Sánchez-Aniorte, I.; Barrio, R.; Casado, Alberto Cacho; Morales, M.; Cárabe, J.; Gandı́a, J.J.; Molpeceres, C.

doi:10.1016/j.apsusc.2011.09.108

Cited by 21 publications

(9 citation statements)

References 6 publications

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“…r processing ha ontacts, has b s than the typ minum fired co ed ohmic conta sufficiently hig urface field fo vation [11]. If e film to form ed contacts, an chnique, referre imes and low on to improve t that provides ty contacts hav ers [14]. CIGS devices utilize a substrate device structure, typically with a glass substrate.…”

Section: Lamentioning

confidence: 99%

Overview of laser processing in solar cell fabrication

2014

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This paper will provide an overview of various laser processing techniques used in the fabrication of solar cells. There are numerous applications of lasers including laser doping, annealing, patterning, drilling and welding that vary based on material system (e.g. silicon wafer, polycrystalline thin-film) and the cell architecture. Laser annealing has been identified as a potential route to high quality thin-films for polycrystalline semiconductors such as CdTe and Cu(In,Ga)(Se,S) 2 . Also for thin-film solar cell technologies, including amorphous-silicon, laser patterning has been widely adopted within the industry for creating monolithic interconnections and performing edge isolation. For silicon wafer based technologies there are a number of promising laser processing techniques, however most of these techniques are still in the development stages and are not yet incorporated into industrial production lines. These techniques that represent the next generation of high-efficiency crystalline silicon devices, include laser-fired contacts, laser doping of selective emitters, laser drilling for "wrap-through" device structures, and laser grooved buried contacts. This paper will present a review of each technique, the specific processing applications and the current state of development.

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Section: Lamentioning

confidence: 99%

Overview of laser processing in solar cell fabrication

2014

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“…But photolithography is expensive and is not a friendly process for large volume industrial production. The alternative method is to use laserfired contacts (LFC) of aluminium (Al) through the rear passivation layer [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Laser fired ohmic contacts in silicon using pulse modulated CW laser

Kumar

Mondal

Soman

et al. 2014

2014 IEEE 2nd International Conference on Emerging Electronics (ICEE)

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This paper discusses a detailed approach to the optimization of laser-fired contacts for the rear surfacepassivated p-type crystalline silicon solar cell. To obtain a proper ohmic contact, there are various parameters which should be taken into account while making LFCs, such as pitch, pulse length (or duty cycle ratio), laser output power and number of pulses. Optimization methodology for forming an ohmic laser-fired contact and the respective parametric values for the pulse modulated CW laser are reported.

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“…Many papers have reported the effects of damage zones during the LFC process . Most of the research efforts have been made to find the LFC process conditions at a reduced laser power in order to suppress the laser‐induced damage . In case of the conventional LFC method, if the laser power is lowered, then the size of the contact holes becomes decreased, resulting in increased series resistances.…”

Section: Introductionmentioning

confidence: 99%

Modified laser‐fired contact process for efficient PERC solar cells

Choi

Jung

Park

et al. 2019

Progress in Photovoltaics

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A laser‐fired contact (LFC) process is one of the techniques for making local electrical contacts at the rear side of passivated emitter and rear cell (PERC) solar cells. In the LFC process, opening of the passivated dielectric layers and alloying of Si and Al need to be made in a single step laser process. For this reason, the LFC process is accompanied by the loss of Al and the laser damage to the Si wafer. In this study, we present a novel multistep LFC process combining the conventional LFC and laser‐induced forward transfer (LIFT) processes. The modified LFC scheme we proposed consists of three steps: (a) opening of the passivation layers and partial alloying of Al‐Si, (b) additional deposition of Al on the local contact holes, and (c) post laser firing of the transferred Al. Applying the modified LFC process to the PERC cells of 1.0 cm2 of area, we demonstrate the effective recombination velocity of the laser‐processed wafers can be remarkably reduced while maintaining the low contact resistance. The best of the PERC solar cell fabricated by the modified LFC process exhibited an efficiency of 19.5% while the conventional LFC‐PERC cell showed 18.6%. The efficiency gains of the modified LFC‐PERC cells was largely contributed by the enhanced open circuit voltage (Voc) and fill factor (FF).

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Optimization of laser-firing processes for silicon-heterojunction solar-cell back contacts

Cited by 21 publications

References 6 publications

Overview of laser processing in solar cell fabrication

Overview of laser processing in solar cell fabrication

Laser fired ohmic contacts in silicon using pulse modulated CW laser

Modified laser‐fired contact process for efficient PERC solar cells

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