IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society 2013
DOI: 10.1109/iecon.2013.6699291
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Optimization of p-emitter/n-buffer using laser annealing technique in IGBT design

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Cited by 3 publications
(5 citation statements)
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“…The detailed assembly process can be found in [7]. Static and dynamic performances of new designed chips are summarized and compared with NPT chips as shown in Table 1 and Table 2, respectively.…”
Section: Device Performance Using Optimized Designmentioning
confidence: 99%
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“…The detailed assembly process can be found in [7]. Static and dynamic performances of new designed chips are summarized and compared with NPT chips as shown in Table 1 and Table 2, respectively.…”
Section: Device Performance Using Optimized Designmentioning
confidence: 99%
“…IGBTs having three different types of n-buffer layer (standard, high and higher N bf ) were fabricated in Dynex 1700V planar gate IGBT production line. The detail fabrication processes have been presented in [7]. After the processes were finished, the wafers were diced and functional chips were assembled at substrate or module levels for characterization and investigation.…”
Section: Device Failure Phenomenonmentioning
confidence: 99%
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“…Alternatively, in order to further improve image quality, those multiple images can be integrated into one image. In this study, not just simply averaging multiple frequency images obtained by the SCM-weighted SA, we propose a new method called SCM-weighted SA-SCM, which has been briefly introduced in our conference paper 26) and is discussed in detail in this paper including further progress. In the SCM-weighted SA-SCM, the SCM processing is applied again to the image lines of the multiple frequency images from the SCM-weighted SA.…”
Section: Introductionmentioning
confidence: 99%
“…Compared to the first and second generation of NPT IGBTs, the device performance using the latest thin film technology has been improved by introducing various doping concentrations in the carrier storage region (CSR), which is also known as SPT technology [3] or field stop concept [4]. It combines the advantages of the first two generations, on the basis of which further generations have evolved [5][6][7]. Different doping profiles have significant effects on the voltage-current characteristics of NPT IGBTs, which can be thoroughly studied by proper estimation of doping concentration in the effective base region (CSR) of IGBT.…”
Section: Introductionmentioning
confidence: 99%