2018
DOI: 10.1117/1.oe.57.1.015101
|View full text |Cite
|
Sign up to set email alerts
|

Optimization of pencil beam f-theta lens for high-accuracy metrology

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2018
2018
2022
2022

Publication Types

Select...
4

Relationship

1
3

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 24 publications
0
2
0
Order By: Relevance
“…A 5-mm diameter collimated laser beam passes through a Focal-piShaper (πShaper, Berlin, Germany), gets into a scanning head and deviates according to the signal from a scanning program from a PC by a system of reflective mirrors. Further it passes through an focal (f -Theta) lens [42,43] and impacts the powder layer on a substrate made in the form of a disc. A charge-coupled device (CCD) camera LaserCam-HR (Coherent, Palo Alto, CA, USA) controls power distribution in a laser beam.…”
Section: Methodsmentioning
confidence: 99%
“…A 5-mm diameter collimated laser beam passes through a Focal-piShaper (πShaper, Berlin, Germany), gets into a scanning head and deviates according to the signal from a scanning program from a PC by a system of reflective mirrors. Further it passes through an focal (f -Theta) lens [42,43] and impacts the powder layer on a substrate made in the form of a disc. A charge-coupled device (CCD) camera LaserCam-HR (Coherent, Palo Alto, CA, USA) controls power distribution in a laser beam.…”
Section: Methodsmentioning
confidence: 99%
“…Based on the optimization design method of single ray tracing, 11 an optimization scheme of RPs to meet the requirements of a normal tracing angle measurement system is proposed in this paper.…”
Section: Introductionmentioning
confidence: 99%