2016
DOI: 10.1038/srep19426
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Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators

Abstract: This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation o… Show more

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Cited by 106 publications
(81 citation statements)
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“…There have been several strategies for improving the surface roughness and morphology of PVDF based films by adding thin insulting layers, micro-patterning, and optimization of annealing conditions [25][26][27].…”
Section: Resultsmentioning
confidence: 99%
“…There have been several strategies for improving the surface roughness and morphology of PVDF based films by adding thin insulting layers, micro-patterning, and optimization of annealing conditions [25][26][27].…”
Section: Resultsmentioning
confidence: 99%
“…In fact, the OSC layer which acts as the top electrode during polarization is not conductive enough to ensure an equipotential. However, electrical polarization of our fabricated devices exhibits excellent time stability28.…”
Section: Electro-mechanical Transducermentioning
confidence: 90%
“…In addition, P(VDF-TrFE) is fully bio-compatible, making it suitable for energy harvesting applications when implanted. P(VDF-TrFE), which can be simply obtained by varying the molar ratio of TrFE in proportion to PVDF, offers several advantages compared to PVDF, including higher piezoelectric coefficient [16], better crystallinity, higher remnant polarization, and higher temperature stability [17,18].…”
Section: Introductionmentioning
confidence: 99%