2009
DOI: 10.1007/s00500-009-0438-9
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Optimization of silicon solar cell fabrication based on neural network and genetic programming modeling

Abstract: This study describes techniques for the cascade modeling and the optimization that are required to conduct the simulator-based process optimization of solar cell fabrication. Two modeling approaches, neural networks and genetic programming, are employed to model the crucial relation for the consecutively connected two processes in solar cell fabrication. One model (Model 1) is used to map the five inputs (time, amount of nitrogen and DI water in surface texturing and temperature and time in emitter diffusion) … Show more

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Cited by 12 publications
(3 citation statements)
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“…On the testing lathe in the laboratory, O2 was used to simulate the reaction gas, while plasma was generated. Via adjusting some control variables, the relationship of gas flow, furnace temperature, reflective microwave power, and pressure inside substrate-tube was observed and shown as The ANN-model is a feed-forward network with hidden layer [4]. Multiple layers of neurons with nonlinear transfer functions allow the network to fit the nonlinear relationships between input and output.…”
Section: Experiments and Modelmentioning
confidence: 99%
See 1 more Smart Citation
“…On the testing lathe in the laboratory, O2 was used to simulate the reaction gas, while plasma was generated. Via adjusting some control variables, the relationship of gas flow, furnace temperature, reflective microwave power, and pressure inside substrate-tube was observed and shown as The ANN-model is a feed-forward network with hidden layer [4]. Multiple layers of neurons with nonlinear transfer functions allow the network to fit the nonlinear relationships between input and output.…”
Section: Experiments and Modelmentioning
confidence: 99%
“…The ANN-model is trained with the available data shown in Fig. 2 [4,5]. According to this model and Eq.…”
Section: Experiments and Modelmentioning
confidence: 99%
“…ML has the capacity to learn a wide variety of nonlinear patterns in high-dimensional datasets and can be used to build data-driven models of process intradependencies and interdependencies . ML-based techniques for PV manufacturing have been explored for solar cell material design, optimizing individual processes, and a combination of processes . It has also been explored with regard to DoE optimization, quality control, and troubleshooting with access to wafer tracking .…”
mentioning
confidence: 99%