Optimization of sub-wavelength texturing structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography

Chen, H.L.; Fan, Wonder; Huang, Kuo‐Cheng; Lin, Ching‐Hsuan; Hsieh, Kuo-Huang

doi:10.1109/imnc.2005.203822

Digest of Papers Microprocesses and Nanotechnology 2005 2005

DOI: 10.1109/imnc.2005.203822

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Optimization of sub-wavelength texturing structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography

H.L. Chen

Wonder Fan

Kuo‐Cheng Huang

et al.

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Optimization of sub-wavelength texturing structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography

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