2014
DOI: 10.1149/2.013407jes
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Optimization of Te Solution Chemistry in the Electrochemical Atomic Layer Deposition Growth of CdTe

Abstract: The deposition of CdTe using the electrochemical form of atomic layer deposition (ALD) is discussed as a function of the Te solution chemistry. 100 cycle CdTe deposits were formed using both acidic and basic solutions of TeO 2 , with and without a reductive Te stripping step. The resulting films were characterized using electron probe microanalysis (EPMA), X-ray diffraction (XRD), microRaman, spectroscopic ellipsometry (SE), and photoelectrochemistry (PEC). EPMA indicated stoichiometric deposits, XRD a strong … Show more

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Cited by 8 publications
(9 citation statements)
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“…30,31 Making of CIGS and CdS thin films by electrodeposition could have larger advantages over other methods, such as low instrumental and apparatus simplicity, low materials cost and efficient utilization of raw materials, low power/energy consumption, high deposition speed, and large area application which are suitable for bulk industrial production. [34][35][36] Performing a series of alternate cycles of the atomic layer deposits by E-ALD may form the materials with preferred thickness and quality, saving resource materials as well as controlling the properties of materials at the atomic level. 33 The E-ALD which was developed by Gregory and Stickney, can be performed in solution phase by the principle of SLRs.…”
Section: Introductionmentioning
confidence: 99%
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“…30,31 Making of CIGS and CdS thin films by electrodeposition could have larger advantages over other methods, such as low instrumental and apparatus simplicity, low materials cost and efficient utilization of raw materials, low power/energy consumption, high deposition speed, and large area application which are suitable for bulk industrial production. [34][35][36] Performing a series of alternate cycles of the atomic layer deposits by E-ALD may form the materials with preferred thickness and quality, saving resource materials as well as controlling the properties of materials at the atomic level. 33 The E-ALD which was developed by Gregory and Stickney, can be performed in solution phase by the principle of SLRs.…”
Section: Introductionmentioning
confidence: 99%
“…7,32 ALD is well-known for the layer-by-layer growth of materials by surface limited reactions (SLRs) in vacuum or gas phase. A variety of semiconductor materials have been successfully deposited by this E-ALD technique, which include CdTe, [36][37][38] CdSe, 38 ZnS, 10 CdS, 10,38-42 CIS, 43,44 and CIGS. 34,35 The SLRs in electrodeposition is based on underpotential deposition (UPD), where the deposition of monolayer takes place under or less than the Nernst potential; where the free energy formation of a surface compound leads to the formation of surface atomic layer.…”
Section: Introductionmentioning
confidence: 99%
“…A handful of semiconductor compounds have been synthesized by E‐ALD techniques, including CIS and CIGS . Wang et al .…”
Section: Introductionmentioning
confidence: 99%
“…The deposition can be also performed as p number of cycles of a certain compound (for example, InSe) and alternate q number of cycles of another compound (for example, Cu 2 Se), called superlattice program, and this process can be repeated to produce the target quantity film. [22][23][24] A handful of semiconductor compounds [22][23][24][25][26][27][28][29][30][31][32][33][34][35][36] have been synthesized by E-ALD techniques, including CIS 33,34 and CIGS. 35,36 Wang et al have deposited CIS on a flexible, carboxyl-functionalized multi-walled carbon nanotube/polyimide (COOH-MWCNT/PI) nanocomposite membrane 33 and Stickney et al have reported CIS on Au surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…The Stickney group has been working on the electrodeposition of semiconductors for the better of two decades, and has led the development of electrochemical of atomic layer deposition (E-ALD) [18][19][20][21][22][23][24][25] .…”
Section: Introductionmentioning
confidence: 99%