Optimization of the geometry of gas-sensitive interdigital capacitors

Interdigital sensors and transducers

“…The mechanism is based on the interaction between the surface of the layer and the gas molecules. Different electrode geometries and their relationship with sensor sensitivity are being investigated [95]. It is found that a very small electrode gap can achieve high sensitivity.…”

“…Conformal mapping is one of the most frequently used approaches for calculation of the capacitance of interdigital structures, especially when the imaginary part of the complex dielectric permittivity of all materials is small enough to be neglected. Typical examples of such analysis are given in [95] and [112] for a case of interdigital electrodes of thickness located on the boundary of two layers with relative permittivity and (no substrate). The layer of thickness , with relative permittivity , fills the gap due to the electrode thickness (see Fig.…”

“…Selection of material and fabrication technique of microelectrodes is determined by the required accuracy, overall fabrication process limitations, and degree of integration between the sensing elements and electronics elements in the same chip package. Most often, the electrodes are formed by patterning sputtered or vaporized metal coatings Al, NiCr, Au [45], [95], and Pt [78]. The spin-coating technique is preferred for formation of very thin layers of material [96].…”

Validation of a Methodology for Cure Process Optimization of Thick Composite Laminates

“…Carefully planning the electrodes size and the space between them, it is possible to evaluate the degree of cure along the whole laminate thickness or in a narrow zone near the sensor. A particular class of coplanar sensors is interdigital one, that are composed of two comb-shaped electrodes interlinked between each other [32][33][34][35][36][37] .…”

A device for skin moisture and environment humidity detection

“…Basic structure of a humidity sensor based on interdigital capacitors. and the interdigital electrodes have been used as transducers for many years [14][15][16][17][18][19]21]. According to the previous research, the IDC is extended to use for recognizing water content of the human skin and environmental humidity in this study.…”