Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method

Yin, Zhifu; Sun, Lei; Zou, Helin; Xu, Shuai

doi:10.1007/s00542-015-2564-x

Cited by 2 publications

(1 citation statement)

References 30 publications

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“…The model used for this numerical simulation was Mooney-Rivlin strain energy function. The parameters used in Mooney-Rivlin model can be calculated according to the Young's modulus of PMMA [35]. By numerical simulation, the stress distribution and the deformation rate of PMMA microchannel can be obtained.…”

Section: Bonding Of Pmma Nozzle By Thermal Bonding Methodsmentioning

confidence: 99%

Low Cost and Simple PMMA Nozzle Fabrication by Laser Cutting and PDMS Curing Bonding

Cheng

Yang

Yin

et al. 2020

Int. J. Precis. Eng. Manuf.

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Electrohydrodynamic (EHD) printing can rapidly fabricate micro-or nano-scale lines without employment of any mask, which is suitable for small volume production in industrial applications. However, it is required that the nozzles should be disposable since they can easily be blocked by the un-cleaned ink. CO 2 laser is an excellent tool for fabrication of microtrenches in most of polymers with low-cost and high-speed. This paper presented a low-cost PMMA (Polymethyl methacrylate) nozzle fabrication method based on laser cutting and PDMS (Polydimethylsiloxane) curing bonding. The influence of thickness on the maximum stress and deformation rate of PMMA substrate was investigated to decrease the deformation of PMMA nozzle after laser cutting. To avoid stress concentration in PMMA nozzle after thermal bonding, PDMS curing bonding method was proposed. The effect of spin-coating speed on PDMS thickness was studied. The O 2 plasma conditions were optimized based on contact angle to improve the bonding strength of PMMA nozzle. The EHD printing experiments demonstrated the practicability of proposed nozzle fabrication method.

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Section: Bonding Of Pmma Nozzle By Thermal Bonding Methodsmentioning

confidence: 99%

Low Cost and Simple PMMA Nozzle Fabrication by Laser Cutting and PDMS Curing Bonding

Cheng

Yang

Yin

et al. 2020

Int. J. Precis. Eng. Manuf.

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View full text Add to dashboard Cite

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Numerical Study on Bonding of Pmma Nanochannels

et al. 2020

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Polymethyl Methacrylate (PMMA) nanochannels are becoming increasingly important for biological, optical and electronic applications. To form a complete PMMA nanochannel/device, the open nanotrench will always be thermal bonded. However, the bonding process which influences the final fabrication precision of PMMA devices has not yet been studied systematically by numerical simulation. In this work, an elastic–plastic model was used for PMMA nanochannel bonding. The influence of temperature, pressure, aspect ratio, and friction coefficient on the dimension loss and max stress was studied systematically. By numerical simulation, all the main influence factors were optimized. It is expected that the proposed simulation method has a high potential for the polymer bonding process analysis.

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Optimization of the profile of the nano-mold and the imprinting conditions by numerical simulation method

Cited by 2 publications

References 30 publications

Low Cost and Simple PMMA Nozzle Fabrication by Laser Cutting and PDMS Curing Bonding

Low Cost and Simple PMMA Nozzle Fabrication by Laser Cutting and PDMS Curing Bonding

Numerical Study on Bonding of Pmma Nanochannels

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