Nitrogen-alloyed AISI 316L coatings with nitrogen contents, [N], between 1.2 and 80 nitrogen atoms per 100 metal atoms (N/100 Me) were obtained by reactive sputter deposition. Coatings comprising only a nitrogen supersaturated metastable face-centred cubic (fcc) phase (s-phase) were obtained for 8.6 4 [N] 4 48 N/100 Me. For [N] 4 5.8 N/100 Me body-centred cubic (bcc) phases were present in the coatings while at [N] 5 65 N/100 Me the coatings comprised unidentified high nitrogen phases in addition to s-phase. The lattice parameter of the fully s-phase coatings increased linearly with increasing [N] according to a 0:3585 0:00075 [N] nmThe hardness of the s-phase coatings attained a maximum value of %20 GPa at [N] % 30-40 N/100 Me. The nitrogen in the s-phase coatings reduced the wear of the coatings by 1-2 orders of magnitude compared to the wrought material by promoting an oxidational wear mechanism.