2004
DOI: 10.2320/matertrans.45.3005
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Optimization of Thickness Uniformity in Electrodeposition onto a Patterned Substrate

Abstract: A numerical simulation based on the finite element method was used to obtain the optimal electrodeposition condition at a patterned cathode. The calculated deposition rates agreed well with the measured ones. Influences of the following parameters on uniformity of electrodeposit have been studied; width of auxiliary electrode, gap between cathode and auxiliary electrode, distance between the inner wall of bath and auxiliary electrode, shape of auxiliary electrode, paddle velocity, gap between cathodes and padd… Show more

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Cited by 31 publications
(16 citation statements)
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“…There are some notable disadvantages related to electrodeposition. Process parameters must be optimized for each workpiece to obtain uniform thickness [60]. Environmental concerns also arise from the process such as the acidic, alkaline, and cyanide discharge.…”
Section: 2mentioning
confidence: 99%
“…There are some notable disadvantages related to electrodeposition. Process parameters must be optimized for each workpiece to obtain uniform thickness [60]. Environmental concerns also arise from the process such as the acidic, alkaline, and cyanide discharge.…”
Section: 2mentioning
confidence: 99%
“…Because electroplating processes are affected by many parameters such as pH, temperature, current density, plating time, metal ions, concentration, agitation [6], and experimental approaches are difficult to estimate the effects of these parameters. So, many studies using simulation have been conducted for efficient studies [1][2][3][7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…[5,6,7] Recently, new attempts have been made by direct irradiation using a high-energy electron beam to achieve surface hardening or surface compositing. [8][9][10][11] When a high-energy electron beam irradiates on the material surface, the kinetic energy of electrons is converted to heat. This thermal energy can readily melt ceramics having high melting points.…”
Section: Introductionmentioning
confidence: 99%