SAW filters with oneport SAW resonators being connected in a ladder structure, which is called ladder type SAW filter, have many features such as low insertion -loss, wide passband and simple filter design and so on. The design methodology, features of characteristics, and developments of higher frequency filter are described for an application in cellular phones . Furthermore, in order to apply to high power SAW devices such as the antenna duplexer of cellular phones , the material of inter-digital transducers (IDT) was improved to have high power durability . The optimum design in a ladder type SAW filter, the improvement in materials for IDT, and the optimum design of the package, all contributed the success of realizing a small SAW antenna duplexer.for the antenna duplexer of cellular phones.' This filter had a low insertion loss of 1-2 dB. However, it had band elimination characteristics and a weak out-of-band rejection of 20 dB. The regular ladder type SAW filter which has SAW resonators both in the series arms and the parallel arms and hence perfect band-pass characteristics was first reported by the authors S,6 and by M. Hikita et.al.'•8 at the same time in 1992. In the development of Ref. 6, the precise difference of the period of inter-digital transducers between the parallel arm resonators and the series arm resonators , which is 0 . 18 u m for 900 MHz-band filters, was realized by using a combination process of a g-line stepper or an i-line stepper with dry etching technique, as described later in this section. This advanced lithography technique, widely used in semiconductor technology, enabled us to realize a ladder type SAW filter composed of all SAW resonators. This highfrequency ladder type SAW filter were found to be low-loss and wide-band without the need for a matching circuit, and was confirmed to be suitable for cellular phone application s$. Since these reports, many papers describing on this type of filter have been published, and these filters including the lattice configurations have together been called SAW impedance element filters (IEF).9 In this section, the structure and principle of ladder type SAW filters, the simulation methods, the designing methods for cellular phone applications, the fabrication process for high frequency filters, and the features of characteristics are described in detail.
Structure and principleThe nominal circuit structure of the ladder type SAW filter is shown in Fig . 1. In this figure, the notations Rs and Rp represent the series-arm resonator and the parallel-arm resonator, respectively. Both Rs and Rp are one-port SAW resonators and their resonant frequencies are slightly different from each other. In order to consider the principle, the basic section of a ladder type filter is shown in Fig.2 where the LC equivalent circuits without lossy elements represent one-port SAW resonators for convenience. In the basic section, the impedance of the series-arm resonator (Zs) and the admittance of the parallel -arm resonator (Yp) are given by the following equati...