Optimum design of reverse osmosis systems for hydrogen peroxide ultrapurification

Abstract

This work is focused on the optimization of a reverse osmosis network proposed for the ultrapurification of chemicals, from technical grade to semiconductor grades demanded in electronic applications that require the use of high‐purity wet chemicals in the semiconductor manufacturing, as it is the case of hydrogen peroxide that is commonly used in the wafer cleaning and surface conditioning processes. An industrial installation able to produce simultaneously the five different Semiconductor Equipment and Materials International Grades of hydrogen peroxide is represented by a simplified superstructure configuration formulated as a nonlinear programming problem. The network integrates reverse osmosis membrane modules, mixers, and split functions, defined by the equations of mass balances and the Kedem–Katchalsky transport model for the description of the permeate flux and the metal rejection coefficients at each membrane stage. The objective of the design is to maximize the daily profit obtained from the sale of the electronic grades of hydrogen peroxide produced by the ultrapurification system. © 2012 American Institute of Chemical Engineers AIChE J, 2012

Safe Direct Synthesis of High Purity H2O2 through a H2/O2 Plasma Reaction

“…60 wt %) form, which complies with the requirements for Grade 1 electronic-grade H 2 O 2 , according to the SEMI standard (Table S1). [17] (Table 1), which is about a factor of five times higher than for the AQ process. However, the highly energy-consuming concentration and purification processes are avoided, and the equipment investment costs would be dramatically reduced.…”

Integration of quality-dependent prices in the optimization strategy for chemicals ultrapurification by reverse osmosis membrane cascades

“…Once the membranes costs were defined, the capital costs corresponding to the rest of the installation were related to them by means of an empirical coefficient that expresses the contribution of the investment in membranes to the total capital costs [12]. The operation costs are essentially based on the consumption of the corresponding resource, except for the case of maintenance costs, which are function of the total capital costs.…”

“…Integration of the several stages by recirculation of retentate streams to previous stages, configuring a membrane cascade, is considered an effective way to combine a high removal of metallic impurities with a high recovery rate [7][8][9][10]. Reverse osmosis membrane cascades have demonstrated their technical and economic viabilities for chemicals ultrapurification [11] and optimization according to economic criteria of the design and operation variables of industrial scale installations have been carried out [12]. The complete optimization of reverse osmosis cascades and other types of networks should include the optimal design of both individual modules and the network configuration.…”

“…As illustrating examples, industrial-scale systems were designed to treat an annual target of 9,000 tons of technical grade peroxide in order to produce each electronic SEMI Grades (from 1 to 5) by membrane cascades. The reverse osmosis membrane selected for these processes systems was the BE model from Woongjin Chemical, which is a polyamide membrane that has demonstrated good performance for hydrogen peroxide ultrapurification [12]. The full characterization of the membrane transport properties and the corresponding model parameters can be found in a previous work [30].…”

Safe Direct Synthesis of High Purity H2O2 through a H2/O2 Plasma Reaction

“…60 wt %) form, which complies with the requirements for Grade 1 electronic-grade H 2 O 2 , according to the SEMI standard (Table S1). [17] The energy consumption for H 2 (Table 1), which is about a factor of five times higher than for the AQ process. However, the highly energy-consuming concentration and purification processes are avoided, and the equipment investment costs would be dramatically reduced.…”