1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)
DOI: 10.1109/ultsym.1997.663019
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Optimum leaky-SAW cut of LiTaO/sub 3/ for minimised insertion loss devices

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Cited by 42 publications
(19 citation statements)
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“…The authors also fabricated the conventional AI-IDTslLiTa03 resonator for reference. In order to minimize a propagation-loss, the Al thickness and rotation angle of the LiTa03 in the conventional structure are often selected to approximately O.lA and 42°Y, respectively [2]. Therefore, the authors fabricated the SAW resonator for reference using AI IDTs(0.lA)/42°YX-LiTa03, which has same IDTs design parameters as the proposed new structure.…”
Section: Methodsmentioning
confidence: 99%
“…The authors also fabricated the conventional AI-IDTslLiTa03 resonator for reference. In order to minimize a propagation-loss, the Al thickness and rotation angle of the LiTa03 in the conventional structure are often selected to approximately O.lA and 42°Y, respectively [2]. Therefore, the authors fabricated the SAW resonator for reference using AI IDTs(0.lA)/42°YX-LiTa03, which has same IDTs design parameters as the proposed new structure.…”
Section: Methodsmentioning
confidence: 99%
“…Figure 7 shows the phase velocity dependence on the metallization ratio. (This calculation used the free VCAL and FEMSDA software developed by Hashimoto and Yamaguchi [6].) The electrode film thickness normalized by the wavelength was 0.1.…”
Section: Ladder-type Saw Filtermentioning
confidence: 99%
“…This has been used to trim the well known 36 YX LiTa03 from 36° to 42° in order to obtain better device performance, demonstrating the importance of the layer thickness as a parameter in selecting a pseudo-SAW orientation. 51 Finally the effect of other layer materials such as gold and platinum for the pseudo SAWs has been discussed in the literature. 25 ' 26 ' 49 ' 50 One of the interesting aspects of the heavier layers is that the merging of the pseudo SAWs to the GSAWs occurs at thinner and therefore more practical layer thicknesses.…”
Section: Properties Of Solutions In Layered Structuresmentioning
confidence: 99%