Optocoupler driving of MEMS electrostatic switches

Abstract

The dynamics of novel optocoupler direct driving of a microelectromechanical systems (MEMS) switch is described by means of PSpice simulations and experimental measurements. The output circuit of an optocoupler array is used to drive an electrostatic MEMS switch. It is shown that the optocoupler drive provides built-in dc voltage step-up conversion with no ripple, galvanic isolation and switching time and energy control in a similar way as current drive does. PSpice models describe the actuation theory including parasitic elements, which can modify the actuation characteristics. Comparison between theory and measurements shows that although there is great impact of parasitic parallel resistance and capacitance, current drive benefits are mostly preserved.

On-Chip Optical Interconnects Made with Gallium Nitride Nanowires

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“…Some applications may be envisioned for the coupled LED/PC NW device with the current performance, particularly where the benefits of galvanic isolation would outweigh the drawbacks of slow switching speed. For instance, the coupled LED/PC NW could function as a solid state relay that uses low-voltage CMOS signals to activate high-voltage MEMS actuators . A key requirement of the coupled LED/PC NW relay is the ability to maintain optical coupling while floating the LED and PC NW bias levels relative to one another, provided that the potential drop on the individual components remains constant.…”

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“…Glass will not react with most chemicals and will not spark. All of these make power-over-fiber an attractive candidate for special applications in utilities dealing with high voltages, transmission towers, medical, and telecom equipment manufacturers as well as for chemical plants, refineries, and aviation applications dealing with corrosive and explosive materials [15][16][17][18][19][20][21].…”

3D heterostructures and systems for novel MEMS/NEMS

“…For such a system to act as an actuator, one or both plates should be movable and fixed to an elastic compensator. A spring [31][32][33][34] or a viscous liquid [35] can be used as the compensator. The system is at equilibrium when the elastic force due to the spring is balanced by the electrostatic attracting force:…”