2022
DOI: 10.3390/s22030872
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Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer

Abstract: The mirror galvanometer is a crucial component of laser cutters/engravers. Novel two-dimensional mirror galvanometers demonstrate less trajectory distortion than traditional one-dimensional ones. This article proposes an optoelectronic sensor that measures a mirror’s inclinations in two dimensions simultaneously. The measuring range, resolution, and sampling rate are ±10°, 0.0265°, and 2 kHz, respectively. With the proposed sensor, a closed-loop control can be further implemented to achieve precision laser mac… Show more

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Cited by 5 publications
(3 citation statements)
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References 24 publications
(22 reference statements)
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“…Several trapezoidal 4-bar mechanisms are stacked orthogonally to tilt the mirror around x- and y- axes. A 2D optoelectronic angular sensor [ 34 ], our former work, can be seamlessly integrated.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…Several trapezoidal 4-bar mechanisms are stacked orthogonally to tilt the mirror around x- and y- axes. A 2D optoelectronic angular sensor [ 34 ], our former work, can be seamlessly integrated.…”
Section: Discussionmentioning
confidence: 99%
“…Since the projected laser spot is an 8 mm × 5 mm ellipse [ 1 , 34 ], the mirror size has to be a little bit larger to cover the whole spot and is set to a 10 mm × 10 mm square. Therefore, the length of linkage #3 is 10 mm.…”
Section: Designmentioning
confidence: 99%
“…YingXue Ni [19] achieved a measurement range of ±2 • and a nonlinearity of 0.72% through specular reflection and QD sensors. ShaoKang Hung [20] established a spot center positional algorithm and realized a measurement of ±10 • and a resolution of 0.0265 • by collecting the spot position through QPD. Mingguang Shan [21] proposed a differential angle measurement system based on optical fiber devices which can achieve a complete linear measurement in the range of ±6.1 • .…”
Section: Introductionmentioning
confidence: 99%