Optoelectronic techniques for constructive characterization of SAW microdevices

Grosu, Neculai; Şchiopu, Paul; Cristea, Ionica; Craciun, Alexandru

doi:10.1117/12.853513

Cited by 2 publications

(5 citation statements)

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“…From an operating frequency of about 1GHz in 1990, the value of operating frequency will climb to about 10GHz by 2010, and resolution for production lithography will climb to about 15 nm by 2010, [11]. A new promising acoustic wave device for high sensitivity bio-detection sensors is the film bulk acoustic resonator -FBAR sensor.…”

Section: Saw Devices Technology Overviewmentioning

confidence: 99%

“…Low frequency devices (up to 200 MHz) were fabricated using traditional optical lithography and the high frequency devices (900 MHz) were fabricated by using electron beam lithography. The line width and spacing of λ/4 of about 100 nm cover the frequencies above 10GHz [11]. The big success of today's SAW micro-devices industry is based on various factors, among others, the development of novel piezoelectric materials and the rapid evolution of resolution for production photolithography, in the last years.…”

Section: Saw Devices Technology Overviewmentioning

confidence: 99%

“…The scanning knife edge technique is a commonly used method for characterization of laser beam profiles [11], focused optical spots , and optical surfaces [3] [10]. This method is explained by Torbjørn Rostadis in reference [5].…”

Section: The Scanning Knife-edge Techniquementioning

confidence: 99%

“…Compared to bulk waves, Rayleigh waves can propagate much longer distances with lower signal attenuation levels, which are nominally proportional to 1/(r) 1/2 for a given frequency, (r=distance). Having in view that the amplitudes of SAW on the piezoelectric substrates are from 5 A to 30 nm, detection of nanomechanical displacements with high sensitivity is vital for reliable SAW microsensors or SAW remote sensing microdevices [11]. The dynamic development of SAW microdevices requires an increasing need for both constructive and operational characterization methods and techniques of the acoustic fields in these devices, especially if higher frequency ranges above 1 GHz.…”

Section: Introductionmentioning

confidence: 99%

“…One of them is presented in the paper [8]. The continuous advances in miniaturization and increasing integration densities technologies need in the same time high accuracy new methods and technique es for geometrical and multifunctional characterization of micro/nanodevices [11].…”

Section: Introductionmentioning

confidence: 99%

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Integration of optoelectronics and SAW technology

et al. 2010

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The number of radio frequency surface acoustic wave (SAW) filters produced presently exceeds 3 billion per year. The demand for high-frequency SAW filters for telecommunications and remote sensing, has led to extensive research, focusing on new SAW microdevices. SAW devices have shown compact structures, small size, low cost, high sensitivity and fast response. The need of miniaturized systems, with high sensitivity and low energy has motivated the need to integrate on the same substrate all the structure of SAW device and connecting electronic circuits. As a consequence, many types of methods of both constructive and operating characterization of SAW devices have been developed. This paper provides a short introduction regarding the developed level of SAW microdevices and describes the results of literature investigation research of optoelectronic techniques for constructive characterization of SAW microdevices. Further research will be done into the determination of SAW parameters such as the amplitude of surface wave, the velocity of wave propagation on the surface of the piezoelectric substrate. Substrates of quartz, lithium tantalite (LiTaO 3 ) and lithium niobate (LiNbO 3 ), are piezoelectric materials commonly used in manufacturing of SAW devices, but these materials are not compatible with the integrated circuit (IC) technology. Three optoelectronic measurement techniques are known for detection of surface acoustic waves: diffraction grating technique, the knife-edge technique, and the detection of ultrasonic vibrations using optical interferometry. The research work given in this paper concentrates on describing of optoelectronic techniques used for constructive characterization of SAW microdevices. Finally, we try to draw some conclusion where: optoelectronic techniques are predicted to be one of the fundamental measurement methods for measurement of future SAW microdevices.

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Section: Saw Devices Technology Overviewmentioning

confidence: 99%

Section: Saw Devices Technology Overviewmentioning

confidence: 99%

Section: The Scanning Knife-edge Techniquementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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