Optothermoplasmonic Nanolithography for On‐Demand Patterning of 2D Materials

Recent years have witnessed the rise of graphene and its applications in various electronic devices. Specifically, featuring excellent flexibility, transparency, conductivity, and mechanical robustness, graphene has emerged as a versatile material for flexible electronics. In the past decade, facilitated by various laser processing technologies, including the laser‐treatment‐induced photoreduction of graphene oxides, flexible patterning, hierarchical structuring, heteroatom doping, controllable thinning, etching, and shock of graphene, along with laser‐induced graphene on polyimide, graphene has found broad applications in a wide range of electronic devices, such as power generators, supercapacitors, optoelectronic devices, sensors, and actuators. Here, the recent advancements in the laser fabrication of graphene‐based flexible electronic devices are comprehensively summarized. The various laser fabrication technologies that have been employed for the preparation, processing, and modification of graphene and its derivatives are reviewed. A thorough overview of typical laser‐enabled flexible electronic devices that are based on various graphene sources is presented. With the rapid progress that has been made in the research on graphene preparation methodologies and laser micronanofabrication technologies, graphene‐based electronics may soon undergo fast development.

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Section: Laser Treatment Of Graphene and Its Derivativesmentioning

confidence: 99%

Laser Fabrication of Graphene‐Based Flexible Electronics

et al. 2019

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“…To decouple the optical heating and scattering, we applied a thermoplasmonic substrate as the heat source (see Supplementary Fig. 4 for the structure and Methods for fabrication procedure) 32 . In addition, we selected polystyrene (PS) and titanium dioxide (TiO 2 ) nanoparticles for the control experiments because of their negligible optical absorption and distinct scattering properties (Supplementary Fig.…”

Section: Resultsmentioning

confidence: 99%

Optical nanomanipulation on solid substrates via optothermally-gated photon nudging

Liu

Lin

et al. 2019

Nat Commun

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Constructing colloidal particles into functional nanostructures, materials, and devices is a promising yet challenging direction. Many optical techniques have been developed to trap, manipulate, assemble, and print colloidal particles from aqueous solutions into desired configurations on solid substrates. However, these techniques operated in liquid environments generally suffer from pattern collapses, Brownian motion, and challenges that come with reconfigurable assembly. Here, we develop an all-optical technique, termed optothermally-gated photon nudging (OPN), for the versatile manipulation and dynamic patterning of a variety of colloidal particles on a solid substrate at nanoscale accuracy. OPN takes advantage of a thin surfactant layer to optothermally modulate the particle-substrate interaction, which enables the manipulation of colloidal particles on solid substrates with optical scattering force. Along with in situ optical spectroscopy, our non-invasive and contactless nanomanipulation technique will find various applications in nanofabrication, nanophotonics, nanoelectronics, and colloidal sciences.

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“…It has been recently observed that the lithographic techniques using electrons or ions may induce structural damage in 2D materials, [ 9 ] or add resist contaminations that need to be removed by plasma cleaning. [ 10 ] Laser ablation is a resist‐free, one‐step alternative, [ 11–13 ] but the optical diffraction limit prevents its use where sub‐micrometer resolution is required. Bottom‐up techniques, like chemical vapor deposition and site‐selective growth, [ 14,15 ] allow for scalability and high resolution.…”

Section: Figurementioning

confidence: 99%

Thermomechanical Nanocutting of 2D Materials

et al. 2020

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Atomically thin materials, such as graphene and transition metal dichalcogenides, are promising candidates for future applications in micro/nanodevices and systems. For most applications, functional nanostructures have to be patterned by lithography. Developing lithography techniques for 2D materials is essential for system integration and wafer‐scale manufacturing. Here, a thermomechanical indentation technique is demonstrated, which allows for the direct cutting of 2D materials using a heated scanning nanotip. Arbitrarily shaped cuts with a resolution of 20 nm are obtained in monolayer 2D materials, i.e., molybdenum ditelluride (MoTe2), molybdenum disulfide (MoS2), and molybdenum diselenide (MoSe2), by thermomechanically cleaving the chemical bonds and by rapid sublimation of the polymer layer underneath the 2D material layer. Several micro/nanoribbon structures are fabricated and electrically characterized to demonstrate the process for device fabrication. The proposed direct nanocutting technique allows for precisely tailoring nanostructures of 2D materials with foreseen applications in the fabrication of electronic and photonic nanodevices.

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Optothermoplasmonic Nanolithography for On‐Demand Patterning of 2D Materials

Cited by 46 publications

References 63 publications

Laser Fabrication of Graphene‐Based Flexible Electronics

Laser Fabrication of Graphene‐Based Flexible Electronics

Optical nanomanipulation on solid substrates via optothermally-gated photon nudging

Thermomechanical Nanocutting of 2D Materials

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