2008
DOI: 10.1016/j.jallcom.2007.11.021
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Ordered nanostructures array fabricated by nanosphere lithography

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Cited by 23 publications
(15 citation statements)
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“…31,32 Other techniques to make black silicon do not need photolithography. The masks are made of silica or polystyrene [33][34][35] particles directly deposited on silicon.…”
Section: Black Siliconmentioning
confidence: 99%
“…31,32 Other techniques to make black silicon do not need photolithography. The masks are made of silica or polystyrene [33][34][35] particles directly deposited on silicon.…”
Section: Black Siliconmentioning
confidence: 99%
“…Sodium Dodecyl Sulphate (SDS) was added to this bath to a concentration of 150 µg L −1 : it has been demonstrated in the literature that SDS can aid the assembly of reagent microspheres on a water surface. 42,43 780 nm diameter carboxylate-terminated polystyrene reagent microspheres obtained from Duke Scientific were mixed with reagent-grade ethanol into a 1:2 microsphere solution : ethanol mixture by volume. This mixture was introduced to the water surface via a hydrophilic glass slide previously cleaned in SDS.…”
Section: Methodsmentioning
confidence: 99%
“…[32][33][34][35][36][37][38][39][40][41][42][43] The most pronounced limitation of such techniques is the difficulty of achieving long-range ordering in the colloidal mask.…”
Section: Introductionmentioning
confidence: 99%
“…Ion etching the PS in coating allows controlling their size and distances between them [7,8]. Besides, in the case of multilayered coating etching PS in the top layer opens those in lower layers and increase a number of the obtained NP.…”
Section: Introductionmentioning
confidence: 99%