2012
DOI: 10.1039/c2jm32767h
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Organic–inorganic nanohybrid nonvolatile memory transistors for flexible electronics

Abstract: We report on a low-temperature fabrication of organic-inorganic nanohybrid nonvolatile memory transistors using molecular layer deposition combined with atomic layer deposition. A 3 nm ZnO:Cu charge trap layer is sandwiched between 6 nm tunneling and 20 nm blocking self-assembled organic layers. First, we identify a large memory window of 14.1 V operated at AE15 V using metal-oxidesemiconductor capacitors. Second, we apply the capacitor structure to the nonvolatile memory transistors which operate in the low v… Show more

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Cited by 14 publications
(10 citation statements)
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“…The various difficulties encountered when using organic precursors are discussed in detail in a review by George et al [24]. Several strategies have been employed to improve the controllability of the growth process, such as using organic precursors with stiff backbones [1314 3237] or with two different functional groups [3639], using reactions requiring surface activation [10,3946], using precursors in which ring-opening reactions occur [47], or using three different precursors instead of two [4849]. …”
Section: Reviewmentioning
confidence: 99%
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“…The various difficulties encountered when using organic precursors are discussed in detail in a review by George et al [24]. Several strategies have been employed to improve the controllability of the growth process, such as using organic precursors with stiff backbones [1314 3237] or with two different functional groups [3639], using reactions requiring surface activation [10,3946], using precursors in which ring-opening reactions occur [47], or using three different precursors instead of two [4849]. …”
Section: Reviewmentioning
confidence: 99%
“…When metal precursors are combined with alcohols or phenols, the resultant material is often called “metalcone” [27]. Most of the research has been focused on the aluminum-based alucones [1213 1516 3839 8197], but also zincones [13,33,3839 46,5152 56,9495 98103], titanicones [53,55,95,104105], and zircones [54,87] have been studied. The schematic structure of ideally growing TMA+ethane-1,2-diol, DEZ+benzene-1,4-diol and TMA+oxiran-2-ylmethanol hybrid films are shown in Fig.…”
Section: Reviewmentioning
confidence: 99%
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