2005
DOI: 10.1143/jjap.44.3686
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Organic Light-Emitting Microdevices Fabricated by Nanoimprinting Technology Using Diamond Molds

Abstract: The fabrication of organic light-emitting microdevices (micro-OLEDs) by nanoimprint lithography (NIL) using diamond molds fabricated by chemical vapor deposition (CVD) was investigated. The diamond molds used in the NIL process were fabricated with the Bi4Ti3O12 octylate (oxide) mask used in electron beam lithography technology. The diamond molds of convex dots of 30 µm square with 60 µm pitch were fabricated. The optimum imprint conditions were found to be as follows: imprinting pressure, press duration, subs… Show more

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Cited by 8 publications
(4 citation statements)
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“…During the last decade, organic light-emitting diodes (OLEDs) have been extensively studied by the international scientific community [1,2,3,4]. This kind of device has attracted great interest due to their adjustable optical and electrical properties [5,6], mechanical flexibility [7,8], low cost [8], and simple manufacturing processes [9].…”
Section: Introductionmentioning
confidence: 99%
“…During the last decade, organic light-emitting diodes (OLEDs) have been extensively studied by the international scientific community [1,2,3,4]. This kind of device has attracted great interest due to their adjustable optical and electrical properties [5,6], mechanical flexibility [7,8], low cost [8], and simple manufacturing processes [9].…”
Section: Introductionmentioning
confidence: 99%
“…The diamond mold has a lifetime about 100 times longer than that of silicon dioxide (SiO 2 ) mold or that of silicon (Si) mold, both using a conventional NIL process. The reason for the longer lifetime is that diamond has many unique properties such as hardness, high thermal conductivity and low thermal expansion [1][2][3]. The diamond mold has been fabricated by radio frequency (RF) oxygen plasma with Bi 4 Ti 3 O 12 octylate mask in the electron beam (EB) lithography technology that we developed [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Some of the common gratings or microlenses are also used for LEDs or OLEDs as antireflective structures. [17]- [25] When light goes from a structure with low refractive index to one with high refractive index, the reflection can be reduced by the structure, making the structure useful for solar cell panels [26], [27] or the front panel of displays. [28] For the use of antireflection, subwavelength structures were fabricated by Kanamori et al, [5], [29] and Kasugai et al [30] .…”
Section: Introductionmentioning
confidence: 99%