1997
DOI: 10.1016/s0924-4247(97)80224-5
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Organic thermal and electrostatic ciliary microactuator array for object manipulation

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Cited by 61 publications
(61 citation statements)
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“…Several MEMS researchers, among others Storment et al 1994;Liu and Will 1995;Jacobson et al 1995;Suh et al 1996) have proposed MEMS manipulator arrays. For an overview, see the work of Liu and Will (1995) or colleagues (1994a, 1994b).…”
Section: Microfabricated Actuator Arraysmentioning
confidence: 99%
See 1 more Smart Citation
“…Several MEMS researchers, among others Storment et al 1994;Liu and Will 1995;Jacobson et al 1995;Suh et al 1996) have proposed MEMS manipulator arrays. For an overview, see the work of Liu and Will (1995) or colleagues (1994a, 1994b).…”
Section: Microfabricated Actuator Arraysmentioning
confidence: 99%
“…For example, the prototype MEMS arrays described in Section 2.1 currently have actuators in only four different directions, and the actuators are only row-wise controllable. Arrays with individually addressable actuators at various orientations are possible (Böhringer et al 1994a(Böhringer et al , 1994bLiu and Will 1995;Böhringer, Donald, and MacDonald 1996b;Suh et al 1996) but require significant development effort. There are also limitations on the resolution of the devices given by fabrication constraints.…”
Section: Manipulation Grammarsmentioning
confidence: 99%
“…Consider a smooth plate motion St = Ost; st t which i s closed, i.e., S0 = ST, for some T 0. The plate's tangential velocity s at a point P is: cx; c y; w = ,u2=u3; u 1=u3; u 3 6…”
Section: Related Workmentioning
confidence: 99%
“…Examples of part manipulation devices which exploit some form of timeasymmetric driving force include air flow nozzle arrays [6] and multi-phase electric field tubes [7]. Arrays of parallel actuators such as orientable rollers [8], thermoactuated cilia [9], and a torsional resonators [10,11] have been proposed as novel designs for non-prehensile manipulation in the plane. The remainder of this paper is organized as follows: In Section II we present the details of plate motion and control.…”
Section: A Related Workmentioning
confidence: 99%
“…To derive eq in terms of d, use eq = r max , Equations 7 and 4, yielding the following linear relationship: eq = a max T 4 2d , 1 (9) Notice that for d = 0 :5, eq = 0 , i.e., as expected the part doesn't feed since the velocity profile is perfectly symmetric, with P = 0 , and t fwd = T= 2.…”
Section: A Quasi-static Analysismentioning
confidence: 99%