Orientation mapping of graphene using 4D STEM-in-SEM

High Resolution Powder Electron Diffraction in Scanning Electron Microscopy

“…At first, a great majority of other 4D-STEM methods have been developed in the field of transmission electron microscopy (4D-STEM-in-TEM; [8] and references therein), while our method is focused on scanning electron microscopy (4D-STEM-in-SEM; [15] and references therein). At second, the so-far-described 4D-STEM-in-SEM methods have been based on older, bulky CCD and CMOS detectors (which required rather non-standard hardware adjustments of SEM microscopes [11][12][13][14]), but our method relies on a modern, small DED detector (which can be installed to any modern SEM microscope with a standard port for STEM [10]). At third, both 4D-STEM-in-TEM and 4D-STEM-in-SEM methods found in the literature have been focused on the analysis of all individual NBD patterns of the 4D-dataset (which requires special software and special crystallographic knowledge [8,9,25]), but our method combines the individual NBD patterns into one simple PNBD pattern (which can be processed with standard, well-established, easy-to-use programs such as PowderCell [15,16,26] or VESTA [27]).…”

“…The fast pixelated DED detectors for SEM were commercialized quite recently [10]. Consequently, just a few examples of 4D-STEM in SEM can be found in the literature, and most of the studies were based on traditional CCD and CMOS detectors [11][12][13][14]. This resulted in somewhat non-standard hardware solutions, in which bulky CCD and CMOS cameras had to be attached to adjusted SEM columns.…”

STEM-in-SEM Imaging and Diffraction with Extremely Beam Sensitive Ultrathin Zeolites

“…The 4D STEM-in-SEM setup used here is described in detail elsewhere [4]. Briefly, a scintillator, mirror assembly, and CCD camera are used to image electrons forward scattered through the sample in a Zeiss Gemini 300 SEM [5].…”

STEM-in-SEM: A Re-Emerging Material Measurement Approach

“…A key feature of this vision is the generation of a multi-dimensional data stack comprising various forms of imaging, diffraction, and spectroscopy from each individual beam position in the raster scan, along with the development of correlative component pairs. To date, NIST has made progress in the realms of electron diffraction [7], angularly selective imaging [8], and 4D STEM [9]. Continued progress toward such a STEM-in-SEM system will require advances in elemental and/or electronic spectroscopies and multivariate hyperspectral methods.…”