Fourier transform infrared reflection absorption spectra (FT-IRAS) of a set of fluorinated ethoxides (CF n H 3-n CH 2 OH, n ) 0-3) on the Cu(111) surface have been obtained. The decomposition reactions of adsorbed mono-, di-, and trifluoroethoxide to gaseous fluoroaldehydes exhibit different reaction kinetics, as previously reported, and the reaction of trifluoroethoxide-d 2 (CF 3 CD 2 O-Cu(111)) exhibits a primary isotope effect. Quantitative measurements of the absorption intensities of CF 3 CH 2 O (ad) and CF 3 CH 2 OH allowed determination of the orientation of the adsorbed trifluoroethoxide. FT-IRAS results indicate that the orientation of trifluoroethoxide is different than that of ethoxide. Ethoxide on the Cu(111) surface has the C-C bond tilted 70 ( 2°from the surface normal while in trifluoroethoxide the C-C bond is oriented 50 ( 5°from the surface normal. In both species the plane of the molecule defined by the C-C-O atoms is tilted toward the surface. This tilt between the plane of the molecule and the plane of the surface normal is 17 ( 2°for ethoxide and 20 ( 11°for trifluorethoxide. These results indicate that the effect of fluorination of the methyl end group is to tilt it away from the surface.