2014
DOI: 10.1017/s143192761400035x
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Orientation Precision of Electron Backscatter Diffraction Measurements Near Grain Boundaries

Abstract: Electron backscatter diffraction (EBSD) has become a common technique for measuring crystallographic orientations at spatial resolutions on the order of tens of nanometers and at angular resolutions <0.1°. In a recent search of EBSD papers using Google Scholar™, 60% were found to address some aspect of deformation. Generally, deformation manifests itself in EBSD measurements by small local misorientations. An increase in the local misorientation is often observed near grain boundaries in deformed microstructur… Show more

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Cited by 44 publications
(28 citation statements)
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“…One measure of orientation precision is the degree of local misorientation within the scan results [11]. This can be characterized using the kernel average misorientation (KAM) [12,13].…”
Section: Kam Resultsmentioning
confidence: 99%
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“…One measure of orientation precision is the degree of local misorientation within the scan results [11]. This can be characterized using the kernel average misorientation (KAM) [12,13].…”
Section: Kam Resultsmentioning
confidence: 99%
“…This leads to a diffraction pattern which is essentially a mix of the two diffractions patterns from the two crystal lattices. The mixed pattern can lead to challenges for the indexing algorithm as discussed in detail by Wright et al [11]. As NPAR increases the virtual interaction volume, this could actually lead to a greater fraction of mixed boundaries leading to a lower overall ISR.…”
Section: Grain Boundariesmentioning
confidence: 99%
“…Low quality patterns will also contribute to noise in the cross-correlations, but generally it is assumed for high quality scans that phosphor screen resolution error will be more significant. Wilkinson provides a rough estimate of the error in the distortion calculation due to phosphor screen resolution at around 50 microstrain [4] (Compare this to the worst case 0.5 • accuracy of conventional EBSD [32][33][34][35], which corresponds to almost 9000 microstrain). Mg Cu Ge Fe ∆θ/bL 1/L 2 Figure 4: Calculated GND curves for annealed magnesium, copper, and iron as well as epitaxial germanium at small step sizes.…”
Section: Resultsmentioning
confidence: 99%
“…The individual patterns are then indexed, usually with automated commercial software, recovering the crystal orientation at each point in the scan. Conventional EBSD software indexes individual patterns to find the local lattice orientation to within about 0.1 • via 2D Hough transforms for best case scenarios, with 0.5 • being a conservative estimate [32][33][34][35]. This information may be used to approximate a distortion gradient if strain components of the deformation tensor are neglected [6].…”
Section: Introductionmentioning
confidence: 99%
“…A high orientation precision is important for many kinds of misorientation and strain analyses using EBSD .…”
Section: Quantitative Post‐processing Of Bkd Patternsmentioning
confidence: 99%