Spontaneous nanoripple formation on (110) surfaces of yttria-stabilized zirconia, YSZ-(110), is achieved by diffusional surface doping with rare-earth oxides. Periodic arrays of parallel nanobars separated by channels (period ∼100 nm) grow out of the dopant sources, covering relatively wide areas of the surface (∼10 μm). The nanobars mound up on the surface by diffusion, exhibiting morphological uniformity and alignment, with their long axis lying parallel to the [11̅0] direction in the YSZ-(110) surface. The process for forming these nanobar arrays can be as simple as sprinkling of rare-earth oxide powder (dopant source) on YSZ-(110) surface and annealing in a high temperature air furnace. However, higher control on dopant dispersion on the surface is demonstrated with other techniques, including photolithography and inkjet printing. The ripple arrays extend anisotropically on the (110) surface, obeying the parabolic growth law, and showing principal values of the rate constant along [11̅0] (maximum) and [001] (minimum), as expected from the symmetry of the (110) surface. The self-patterned ceramic substrates are well-suited for pattern transfer by replica molding, as illustrated by single-step molding with polydimethylsiloxane (PDMS), which is a widely used biomaterial in cell-culture studies.