“…Edge and mixed (screw/edge) dislocations in nitride materials act as nonradiative recombination centers and as conduits for charge transport resulting in leakage currents and breakdown (Amano et al, 2003;Davis et al, 2002). While high threading dislocation density is acceptable for light emitting diodes (LEDs) 6 -usually their small effect on the performance is attributed to the potential fluctuations related to the indium composition fluctuations (resulting from the poor In incorporation in the epitaxial layer during the growth or from the phase separation due to the large miscibility gap (I-hsiu & Stringfellow, 1996;Karpov, 1998;Korcak et al, 2007) ) observed in the active layers made from the ternary solid solution InGaN and in the corresponding QWs (Christen et al, 2003;Limb, 2007;Mukai et al, 2001) that provide the localization of carriers and reduce their in-plane diffusion to the non-radiative recombination centers -the high dislocation density, however, is fatal for laser diodes and power transistors; even for the LEDs including indium-free violet ones (Usikov et al, 2003) it leads to the drop in the efficiency and is the main factor of the device failure (Karpov, 2009;Roycroft et al, 2004 (Jain et al, 2000;Kukushkin et al, 2008;Miskys et al, 2003). Sapphire is a good choice for the nitride layers from the crystallographic point of view: crystal orientations of sapphire and gallium nitride grown on c-plane (0001) are parallel, with the unit cell of GaN being rotated by 30 • about c axis with respect to the unit cell of sapphire; the (1100) axis of GaN is parallel to the (1210) sapphire axis (Jain et al, 2000).…”