OS0117 In-situ ellipsometry of Cu surfaces immersed in BTA-H_2O_2 solutions

Kawakami, Tatsuya; Kondoh, Eiichi; Watanabe, Mitsuhiro; Hamada, Shigeru; Shima, Shohei; Hiyama, Hirokuni

doi:10.1299/jsmekanto.2016.22._os0117-1_

The Proceedings of Conference of Kanto Branch

2016

DOI: 10.1299/jsmekanto.2016.22._os0117-1_

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OS0117 In-situ ellipsometry of Cu surfaces immersed in BTA-H_2O_2 solutions

Tatsuya Kawakami

Eiichi Kondoh

Mitsuhiro Watanabe

et al.

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OS0117 In-situ ellipsometry of Cu surfaces immersed in BTA-H_2O_2 solutions

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