Out‐of‐plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

Arevalo, Arpys; Castells-Rufas, David; Castro, David; Diaz, Marlon; Foulds, Ian G.

doi:10.1049/mnl.2015.0198

Cited by 7 publications

(4 citation statements)

References 23 publications

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“…The use of polymerbased substrates to support thermoelectric (TE) materials is of special interest since highly advantageous inorganic materials can be integrated, including those with superior thermal and electrical properties [50]. An important advantage of polymer-based substrates, such polyimide (PI) [51] and SU8 [52], is their capability to form out of plane structures [53,54] and be used with more advanced photolithography-based fabrication techniques, which can offer greater resolutions, hence allowing the creation of more complex and compact implementations [51][52][53][54]. On the other hand, paper is a remarkable structural material which can be used to fabricate simple, affordable and flexible TEGs [55].…”

Section: Introductionmentioning

confidence: 99%

Paper-based origami flexible and foldable thermoelectric nanogenerator

et al. 2017

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Paper has been an essential material in our daily life since ancient times. Its affordability, accessibility, adaptability, workability and its easiness of usage makes it an attractive structural material to develop many kind of technologies such as flexible electronics, energy storage and harvesting devices. Additionally, the scientific community has increased its interest on waste heat as an environmentally friendly energy source to support the increasing energy demand. Therefore, in this paper we described two affordable and flexible thermoelectric nanogenerators (TEGs) developed on paper substrates by the usage of simple micromachining and microfabrication techniques. Moreover, they exhibit mechanical stability and adaptability (through folding and cutting techniques) for a diverse set of scenarios where vertical or horizontal schemes can be conveniently used depending on the final application. The first TEG device, implemented on standard paper, generated a power of

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Section: Introductionmentioning

confidence: 99%

Paper-based origami flexible and foldable thermoelectric nanogenerator

et al. 2017

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“…[29][30][31][32][33][34] However, existing systems usually have folding angles of less than 90°, and have been difficult to integrate into origami designs with more complex motions and functions. Separate attempts have created 3D assembly with large folding angles using tradition MEMS processes, but these systems usually require manual assembly with probe stations [37][38][39] or through an applied magnetic field. [20][21][22][23][24] We show that with the proposed method, we can self-assemble the gripper and achieve a large gripping motion using the same base design.…”

Section: Controllable Multi-degree-of-freedom Shape Morphing For Compmentioning

confidence: 99%

Elastically and Plastically Foldable Electrothermal Micro‐Origami for Controllable and Rapid Shape Morphing

Birla

Oldham

et al. 2020

Adv Funct Materials

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Integrating origami principles within traditional microfabrication methods can produce shape morphing microscale metamaterials and 3D systems with complex geometries and programmable mechanical properties. However, available micro-origami systems usually have slow folding speeds, provide few active degrees of freedom, rely on environmental stimuli for actuation, and allow for either elastic or plastic folding but not both. This work introduces an integrated fabrication-design-actuation methodology of an electrothermal micro-origami system that addresses the above-mentioned challenges. Controllable and localized Joule heating from electrothermal actuator arrays enables rapid, large-angle, and reversible elastic folding, while overheating can achieve plastic folding to reprogram the static 3D geometry. Because the proposed micro-origami do not rely on an environmental stimulus for actuation, they can function in different atmospheric environments and perform controllable multi-degrees-of-freedom shape morphing, allowing them to achieve complex motions and advanced functions. Combining the elastic and plastic folding enables these micro-origami to first fold plastically into a desired geometry and then fold elastically to perform a function or for enhanced shape morphing. The proposed origami systems are suitable for creating medical devices, metamaterials, and microrobots, where rapid folding and enhanced control are desired.

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“…Electro-thermal (ET) actuation is a popular transduction mechanism that can produce large folding motions actively. [3,4,18,37] Past research has shown that these systems are useful for building micro-cages, [3,4] micro-manipulators, [38] and micro-grippers. [24] Among ET actuators, polymer-based systems can provide superior folding capabilities because of the high thermalexpansion coefficient of polymeric materials.…”

Section: Introductionmentioning

confidence: 99%

Mixed‐Transducer Micro‐Origami for Efficient Motion and Decoupled Sensing

Zhu,

Ghrayeb,

et al. 2024

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This work introduces a mixed‐transducer micro‐origami to achieve efficient vibration, controllable motion, and decoupled sensing. Existing micro‐origami systems tend to have only one type of transducer (actuator/sensor), which limits their versatility and functionality because any given transducer system has a narrow range of advantageous working conditions. However, it is possible to harness the benefit of different micro‐transducer systems to enhance the performance of functional micro‐origami. More specifically, this work introduces a micro‐origami system that can integrate the advantages of three transducer systems: strained morph (SM) systems, polymer based electro‐thermal (ET) systems, and thin‐film lead zirconate titanate (PZT) systems. A versatile photolithography fabrication process is introduced to build this mixed‐transducer micro‐origami system, and their performance is investigated through experiments and simulation models. This work shows that mixed‐transducer micro‐origami can achieve power efficient vibration with high frequency, large vibration ranges, and little degradation; can produce decoupled folding motion with good controllability; and can accomplish simultaneous sensing and actuation to detect and interact with external environments and small‐scale samples. The superior performance of mixed‐transducer micro‐origami systems makes them promising tools for micro‐manipulation, micro‐assembly, biomedical probes, self‐sensing metamaterials, and more.

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Out‐of‐plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

Cited by 7 publications

References 23 publications

Paper-based origami flexible and foldable thermoelectric nanogenerator

Paper-based origami flexible and foldable thermoelectric nanogenerator

Elastically and Plastically Foldable Electrothermal Micro‐Origami for Controllable and Rapid Shape Morphing

Mixed‐Transducer Micro‐Origami for Efficient Motion and Decoupled Sensing

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